Inventors:
- Santa Clara CA, US
Harry ATWATER - South Pasadena CA, US
Thomas GMITTER - Sunnyvale CA, US
Gang HE - Cupertino CA, US
Andreas HEGEDUS - Burlingame CA, US
Gregg HIGASHI - San Jose CA, US
Stewart SONNENFELDT - Burlingame CA, US
International Classification:
H01L 21/78
H01L 21/306
H01L 21/02
H01L 21/683
Abstract:
Embodiments of the invention generally relate to epitaxial lift off (ELO) thin films and devices and methods used to form such films and devices. In one embodiment, a method for forming an ELO thin film is provided which includes depositing an epitaxial material over a sacrificial layer on a substrate, adhering a flattened, pre-curved support handle onto the epitaxial material, and removing the sacrificial layer during an etching process. The etching process includes bending the pre-curved support handle to have substantial curvature while peeling the epitaxial material from the substrate and forming an etch crevice therebetween. Compression is maintained within the epitaxial material during the etching process. The flattened, pre-curved support handle may be formed by flattening a pre-curved support material.