Shahzad Akbar - Poughkeepsie NY Jack O. Chu - Astoria NY Brian Cunningham - Highland NY Gregory Fitzgibbon - Hopewell Junction NY Somnuk Ratanaphanyarat - Poughkeepsie NY
Assignee:
International Business Machines Corporation - Armonk NY
International Classification:
C30B 2500
US Classification:
156 62
Abstract:
A method of depositing Ge on a Si substrate in a reaction chamber includes the steps of: precleaning the substrate; evacuating the chamber to a pressure below 10. sup. -7 Torr; heating the substrate to 300. degree. -600. degree. C. ; and providing a GeH. sub. 4 /B. sub. 2 H. sub. 6 /He mixture of gas with a GeH. sub. 4 partial pressure of 2-50 mTorr and a B. sub. 2 H. sub. 6 partial pressure of 0. 08 to 2 mTorr.
Joe Dons first band was Called Lost Cause which later became known as Unclethumbtack with Gregory Fitzgibbon(Singer Songwriter and Bass guitarist), Erin Fitzgibbon (Singer ...