Inventors:
Xueping Xu - Stamford CT, US
Robert P. Vaudo - New Milford CT, US
International Classification:
B32B009/04
B24B001/00
H01L021/302
US Classification:
428698, 428689, 428697, 438691, 438692, 438693, 451 36, 451 37, 451 57
Abstract:
AlGaInN, wherein 0≦x≦1, 0≦y≦1, 0≦z≦1, and x+y+z=1, characterized by a root mean square surface roughness of less than 1 nm in a 10×10 μmarea. The AlGaInN may be in the form of a wafer, which is chemically mechanically polished (CMP) using a CMP slurry comprising abrasive particles, such as silica or alumina, and an acid or a base. High quality AlGaInN wafers can be fabricated by steps including lapping, mechanical polishing, and reducing internal stress of said wafer by thermal annealing or chemical etching for further enhancement of its surface quality. CMP processing may be usefully employed to highlight crystal defects of an AlGaInN wafer.