Jay Kim

7164095, Jan 16, 2007

Jul 7, 2004

10/885237

Sang Hun Lee - Austin TX, US
Jay Joongsoo Kim - San Jose CA, US

Noritsu Koki Co., Ltd. - Wakayama
Amarante Technologies, Inc. - Santa Clara CA

B23K 10/00

2191215, 118723 MW

Systems and methods for generating relatively cool microwave plasma. The present invention provides a microwave plasma nozzle that includes a gas flow tube through which a gas flows, and a rod-shaped conductor that is disposed in the gas flow tube and has a tapered tip near the outlet of the gas flow tube. A portion of the rod-shaped conductor extends into a microwave cavity to receive microwaves passing in the cavity. These received microwaves are focused at the tapered tip to heat the gas into plasma. The microwave plasma nozzle also includes a vortex guide between the rod-shaped conductor and the gas flow tube imparting a helical shaped flow direction around the rod-shaped conductor to the gas flowing through the tube. The microwave plasma nozzle further includes a mechanism for electronically exciting the gas and a shielding mechanism for reducing a microwave power loss through the gas flow tube.

7189939, Mar 13, 2007

Sep 1, 2004

10/931221

Sang Hun Lee - Austin TX, US
Jay Joongsoo Kim - San Jose CA, US

Noritsu Koki Co., Ltd. - Wakayama
Amarante Technologies, Inc. - Santa Clara CA

B23K 10/00

21912136, 21912152, 21912148, 21912151, 20429838, 31511151

A portable microwave plasma discharge unit receives microwaves and a gas flow via a supply line. The portable microwave plasma discharge unit generates plasma from the gas flow and the received microwaves. The portable microwave plasma discharge unit includes a gas flow tube made of a conducting and/or dielectric material and a rod-shaped conductor that is axially disposed in the gas flow tube. The rod-shaped conductor has an end configured to contact a microwave supply conductor of the supply line to receive microwaves and a tapered tip positioned adjacent the outlet portion of the gas flow tube. The tapered tip is configured to focus the microwaves received from the microwave supply conductor to generate plasma from the gas flow.

7271363, Sep 18, 2007

Sep 1, 2004

10/931223

Sang Hun Lee - Austin TX, US
Jay Joongsoo Kim - San Jose CA, US
Togo Kinoshita - Wakayama, JP

Noritsu Koki Co., Ltd. - Wakayama-shi
Amarante Technologies, Inc. - Santa Clara CA

B23K 10/00
A61B 18/18

21912143, 21912151, 21912136, 21912152, 21912148, 21912175, 31511151, 606 37, 606 40

Portable microwave plasma systems including supply lines for providing microwaves and gas flow are disclosed. The supply line includes at least one gas line or conduit and a microwave coaxial cable. A portable microwave plasma system includes a microwave source, a waveguide-to-coax adapter and a waveguide that interconnects the microwave source with the waveguide-to-coax adapter, a portable discharge unit and the supply line. The portable discharge unit includes a gas flow tube coupled to the supply line to receive gas flow and a rod-shaped conductor that is axially disposed in the gas flow tube and has an end configured to receive microwaves from the microwave coaxial cable and a tapered tip positioned adjacent the outlet portion of the gas flow tube. The tapered tip is configured to focus microwave traveling through the rod-shaped conductor and generate plasma from the gas flow.

7806077, Oct 5, 2010

Jul 30, 2004

10/902435

Sang Hun Lee - Austin TX, US
Jay Joongsoo Kim - San Jose CA, US

Amarante Technologies, Inc. - San Jose CA
Saian Corporation - Wakayama-Shi

C23F 1/00
C23C 16/00
H01L 21/306

118723MW, 15634536, 15634541

Microwave plasma nozzle array systems and methods for configuring the microwave plasma nozzle arrays are disclosed. The microwaves are transmitted to a microwave cavity in a specific manner and form an interference pattern that includes high-energy regions within the microwave cavity. The high-energy regions are controlled by the phases and the wavelengths of the microwaves. A plurality of nozzle elements is provided in the array. Each of the nozzle elements has a portion partially disposed in the microwave cavity and receives a gas for passing therethrough. The nozzle elements receive microwave energy from one of the high-energy regions. Each of the nozzle elements include a rod-shaped conductor having a tip that focuses the microwaves and a plasma is then generated using the received gas.

20060021980, Feb 2, 2006

Jul 30, 2004

10/902433

Sang Lee - Austin TX, US
Jay Kim - San Jose CA, US

H05B 6/74

219747000, 422021000, 422186000

Systems and methods for controlling a power distribution in a microwave cavity are disclosed. The present invention provides a system that includes a microwave source and a pair of isolators that dissipate retrogressing microwaves that travel toward the microwave source. The isolators are connected to the microwave source. The system also includes a microwave cavity having a pair of inlets disposed on opposite sides of the microwave cavity, a pair of waveguides operatively connected to the inlets to the isolators, respectively; a pair of non-rotating phase shifters operatively connected to the waveguides and the isolators, respectively; a pair of circulators operatively connected to the waveguides and being configured to direct the microwaves to the pair of non-rotating phase shifters, respectively. A power distribution within the microwave cavity is controlled by operation of at least one of the pair of non-rotating phase shifters.

20060052883, Mar 9, 2006

Sep 8, 2004

10/935743

Sang Lee - Austin TX, US
Jay Kim - San Jose CA, US

G05B 13/02

700028000, 700045000

Method, systems and computer readable media for optimizing data acquisition of microwave plasma are disclosed. The present invention provides a method that includes the steps of selecting an operational condition for a plasma generation system, operating the plasma generation system under the selected operational condition, determining whether a stable plasma is established using a sensing device and acquiring/storing plasma data if the stable plasma is established. The method further includes a step of repeating data acquisition under various operational conditions to establish a database for plasma characterization. The present invention further provides a feedback control module that operates in conjunction with a plasma generating system to automate and optimize the process of data acquisition.