Inventors:
Linda Romano - Sunnyvale CA, US
David P. Bour - Cupertino CA, US
Andrew Edwards - San Jose CA, US
Hui Nie - Cupertino CA, US
Isik C. Kizilyalli - San Francisco CA, US
Richard J. Brown - Los Gatos CA, US
Thomas R. Prunty - San Clara CA, US
Assignee:
Avogy, Inc. - San Jose CA
International Classification:
H01L 21/3205
US Classification:
438604, 257E21085, 257E21097, 257E21108, 257E21172, 257E21403, 257458, 257483, 257484, 257489, 257615, 438167, 438186, 438570
Abstract:
A method for fabricating edge termination structures in gallium nitride (GaN) materials includes providing a n-type GaN substrate having a first surface and a second surface, forming an n-type GaN epitaxial layer coupled to the first surface of the n-type GaN substrate, and forming a growth mask coupled to the n-type GaN epitaxial layer. The method further includes patterning the growth mask to expose at least a portion of the n-type GaN epitaxial layer, and forming at least one p-type GaN epitaxial structure coupled to the at least a portion of the n-type GaN epitaxial layer. The at least one p-type GaN epitaxial structure comprises at least one portion of an edge termination structure. The method additionally includes forming a first metal structure electrically coupled to the second surface of the n-type GaN substrate.