Inventors:
Hironori Araki - Milpitas CA, US
Yoshitaka Sasaki - Santa Clara CA, US
Hiroyuki Ito - Milpitas CA, US
Kazuki Sato - Milpitas CA, US
Shigeki Tanemura - Milpitas CA, US
Yukinori Ikegawa - Milpitas CA, US
Assignee:
Headway Technologies, Inc. - Milpitas CA
International Classification:
B44C 1/22
G11B 5/127
G11B 11/00
US Classification:
216 22, 216 2, 216 24, 216 41, 216 56, 216 58, 216 67, 216 69, 216 70, 216 71, 36012501, 36012502, 36012503, 36012504, 36012505, 36012506, 296021, 2960301, 2960307, 2960313, 369 1301, 369 1302, 369 1314, 369 1317, 369 1318, 369 1322, 369 1324, 369 1332, 369 1333
Abstract:
In a method of forming a main pole, an initial accommodation layer is etched by RIE using a first etching mask having a first opening, whereby a groove is formed in the initial accommodation layer. Next, a part of the initial accommodation layer including the groove is etched by RIE using a second etching mask having a second opening, so that the groove becomes an accommodation part. The main pole is then formed in the accommodation part. The first etching mask has first and second sidewalls that face the first opening and are opposed to each other at a first distance in a track width direction. The second etching mask has third and fourth sidewalls that face the second opening and are opposed to each other at a second distance greater than the first distance.