Inventors:
- Santa Clara CA, US
Yixiong Yang - Fremont CA, US
Yong Wu - Sunnyvale CA, US
Wei V. Tang - Santa Clara CA, US
Srinivas Gandikota - Santa Clara CA, US
Yongjing Lin - San Jose CA, US
Karla M Bernal Ramos - San Jose CA, US
Shih Chung Chen - Cupertino CA, US
Assignee:
Applied Materials, Inc. - Santa Clara CA
International Classification:
H01L 27/11556
H01L 21/285
H01L 21/67
H01L 21/28
C23C 16/06
H01L 21/311
C23C 16/50
C23C 16/455
H01L 29/423
Abstract:
Methods of forming memory structures are discussed. Specifically, methods of forming 3D NAND devices are discussed. Some embodiments form memory structures with a metal nitride barrier layer, an α-tungsten layer, and a bulk metal material. The barrier layer comprises a TiXN or TaXN material, where X comprises a metal selected from one or more of aluminum (Al), silicon (Si), tungsten (W), lanthanum (La), yttrium (Yt), strontium (Sr), or magnesium (Mg).