Inventors:
Reza Arghavani - Aloha OR
Robert S. Chau - Beaverton OR
Weimin Han - Portland OR
Assignee:
Intel Corporation - Santa Clara CA
International Classification:
H01L 2131
H01L 21469
Abstract:
A method of processing a semiconductor substrate, comprising the steps of: heating a substance within a first chamber, at a selected temperature which is above the minimum decomposition temperature of the substance, to cause decomposition of the substance into a predetermined gas; cooling the gas to below the minimum decomposition temperature of the substance; transporting the gas from the first chamber to a second chamber; and exposing a semiconductor substrate, located in the second chamber, to the cooled gas.