Viktoria Anna Temesvary

6556737, Apr 29, 2003

Nov 2, 2000

09/705416

Denny K. Miu - Valencia CA
Weilong Tang - San Gabriel CA
Viktoria Temesvary - Los Angeles CA
Brent E. Burns - Rancho Palos Verdes CA

Integrated Micromachines, Inc. - Monrovia CA

G02B 642

385 16, 385 18, 359196, 359224

A fiber-optic microswitch is disclosed that includes a flexible mirror positioning structure including an outer fixed frame, a movable platform upon which a mirror is formed, and two or more resilient support members (e. g. , monocrystalline silicon springs or torsion beams) connecting the movable platform to the fixed frame. Stationary fibers are mounted over the mirror. An electromagnetic drive mechanism is provided for positioning the movable platform relative to the fixed frame. The electromagnetic drive mechanism includes one or more coils formed on a drive substrate mounted under the monocrystalline structure, and one or more pole pieces that are mounted on the movable platform. Currents are selectively applied to the coils to generate attractive electromagnetic forces that pull the pole pieces, thereby causing the movable platform to move (e. g. , tilt) relative to the fixed frame, thereby selectively directing light from one fiber to another. Various monocrystalline structures are disclosed.

20020130561, Sep 19, 2002

Nov 8, 2001

10/036769

Viktoria Temesvary - Los Angeles CA, US
Salleh Ismail - Moorpark CA, US
Shuyun Wu - Arcadia CA, US

H02K041/00

310/012000

A moving coil motor has an axisymmetric magnetic field applied to the drive coils on the movable member of the motor. The movable member is suspended by springs. The moving coil motor may be configured in a MEMS format, with the movable member and its suspension springs fabricated from a mono-crystalline substance to improve structural integrity. MEMS based moving coil motors may be configured in an array. Sensors are provided to detect the relative spatial positions of the movable member. The movable member may include several tiers. In one application, the moving coil motor may be configured to support and drive a mirror surface on the movable member to form a galvanometer, optical switch, or other optical component. Singular moving coil motors may be configured in an optical cavity to facilitate the tuning of specific wavelengths while a number of moving coil motors may be configured to form an array of optical switches to facilitate switching in a multi-channel optical network.

58215964, Oct 13, 1998

Mar 24, 1997

8/822839

Denny K. Miu - Valencia CA
James R. W. Clymer - Mountain View CA
Paul A. Endter - Chandler AZ
Viktoria A. Temesvary - Culver City CA
Weilong Tang - Alhambra CA

Integrated Micromachines, Inc. - Burbank CA

H01L 2982
H01L 4300

257419

A micro-switch having a flexible conductive membrane which is moved by an external force, such as pressure from an air flow, to establish a connection between contact pads. The conductive membrane is stretched over one or more spacer pads to introduce deformation in the conductive membrane, thereby improving the accuracy and repeatability of the micro-switch. The spacing between the contact pads and the conductive membrane is precisely controlled by controlling the height difference between the spacer pads and the conductive pads. This height difference is determined by one or more precisely controlled etch operations.

57240159, Mar 3, 1998

Jun 1, 1995

8/457468

Yu-Chong Tai - Pasadena CA
Denny K. Miu - Valencia CA
Weilong Tang - Alhambra CA
Viktoria Temesvary - Culver City CA
Shuyun Wu - Pasadena CA

California Institute of Technology - Pasadena CA

H01H 5122

335 78

A bulk micromachined inductive transducer on single crystal silicon. The bulk micromachined micro-device has movable parts integrated with electromagnetically-driven microactuators for moving the parts. The integrated electromagnetic microactuators of the present micromachine move the movable parts in in-plane and/or out-of-plane sub-millimeter level motions in either translational or rotational directions.

57785139, Jul 14, 1998

Feb 9, 1996

8/599018

Denny K. Miu - Valencia CA
Weilong Tang - Alhambra CA
Viktoria A. Temesvary - Culver City CA

H01F 414
H01H 1500

296021

A micro-relay has a flexible monocrystalline structure which is moved by an electromagnetic force to establish a connection between relay contact elements. The micro-relay includes a substrate having a magnetic pathway and one or more coils located over the magnetic pathway. A first contact pad is coupled to the substrate. The monocrystalline structure is suspended over the substrate. A second contact pad and pole pieces are coupled to the monocrystalline structure such that the second contact pad is positioned over the first contact pad, and the pole pieces are located over the coils. A current is applied to the coils to generate an electromagnetic force which flexes the monocrystalline structure toward the substrate, thereby causing the second contact pad to touch the first contact pad. In one embodiment, the coils include insulating spacers located adjacent to the innermost and outermost traces to prevent shorting.