US Patent:
20030020585, Jan 30, 2003
Inventors:
Bryan Staker - Pleasanton CA, US
Douglas Teeter - Mountain View CA, US
Thomas DeBey - San Jose CA, US
David Amm - Kingston, CA
Assignee:
GlimmerGlass Networks, Inc. - Hayward CA
International Classification:
H01F005/00
Abstract:
An array apparatus has a micromachined SOI structure, such as a MEMS array, mounted directly on a class of substrate, such as low temperature co-fired ceramic, in which is embedded electrostatic actuation electrodes disposed in substantial alignment with the individual MEMS elements, where the electrostatic electrodes are configured for substantial fanout and the electrodes are oversized such that in combination with the ceramic assembly are configured to allow for placement of the vias within a tolerance of position relative to electrodes such that contact is not lost therebetween at the time of manufacturing.
