Inventors:
Kwok K. Ng - Union NJ
Simon M. Sze - Berkeley Heights NJ
Assignee:
American Telephone and Telegraph Co., AT&T Bell Laboratories - Murray Hill NJ
International Classification:
H01L 2978
H01L 2712
H01L 2980
H01L 2948
Abstract:
A new SOI device which permits both the kink effect to be avoided and threshold voltage to be regulated, as well as a new method for fabricating SOI ICs, is disclosed. The new device included an electrically conductive pathway extending from the active volume and terminating in a non-active region of the substrate of the device. A back-gate bias is communicated to, and kink-inducing charges are conducted away from, the active volume through the conductive pathway. The new fabrication methd permits SOI ICs to be fabricated using available circuit designs and pattern delineating apparatus, e. g. , IC mask sets. This method involves the formation of a precursor substrate surface which includes islands of insulating material, each of which is encircled by a crystallization seeding area of substantially single crystal semiconductor material. The boundaries of the islands are defined with a first pattern delineating device, e. g. , a mask, which, in terms of the pattern it produces, is substantially identical to a second pattern delineating device.