Silja T James from Mountain View, CA, age 41

Resumes

Mechanical Engineer At Applied Materials

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Location:

San Francisco Bay Area

Industry:

Mechanical or Industrial Engineering

Experience:

Applied Materials (Public Company; 10,001 or more employees; AMAT; Semiconductors industry): Mechanical Engineer, (July 2008-Present) Mechanical Engineer with the Thin Film Solar hardware group.Lux Engineering Analysis (Defense & Space industry): FEA Analyst, ...

Silja James

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Publications

Us Patents

Processing Chamber With Translating Wear Plate For Lift Pin

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US Patent:

20110164955, Jul 7, 2011

Filed:

Jul 13, 2010

Appl. No.:

12/835511

Inventors:

John M. White - Hayward CA, US
Jeonghoon Oh - San Jose CA, US
Tom K. Cho - Los Altos Hills CA, US
Silja James - Mountain View CA, US
Uday Pai - San Jose CA, US
Oscar Lopez - Watsonville CA, US
Alexander S. Polyak - San Jose CA, US

Assignee:

APPLIED MATERIALS,INC. - Santa Clara CA

International Classification:

H01L 21/683
F16M 11/00

US Classification:

414800, 24834601

Abstract:

Embodiments of a method and apparatus for processing large area substrates including a translational wear plate and/or bushing assembly are provided for reducing the stress on a lift pin used to space substrates from a substrate support in a processing or other type of chamber. In another embodiment, an apparatus for processing substrates includes processing chamber comprising a substrate support disposed in a chamber body. A bushing assembly is disposed in the substrate support. A lift pin is disposed through the bushing assembly. A wear plate is provided that is coupled to the chamber body and aligned with the lift pin. The wear plate is movable laterally relative to a centerline of the chamber body to accommodate lateral motion of the lift pin when contacting the wear plate.

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