Inventors:
Daniel Edelstein - White Plains NY, US
Paul Andry - Yorktown Heights NY, US
Leena Buchwalter - Hopewell Junction NY, US
Jon Casey - Poughkeepsie NY, US
Sherif Goma - Hawthorne NY, US
Raymond Horton - Dover Plains NY, US
Gareth Hougham - Ossining NY, US
Michael Lane - Cortlandt Manor NY, US
Xiao Liu - Briarcliff Manor NY, US
Chirag Patel - Peekekill NY, US
Edmund Sprogis - Underhill VT, US
Michelle Steen - Danbury CT, US
Brian Sundlof - Verbank NY, US
Cornelia Tsang - Mohegan Lake NY, US
George Walker - New York NY, US
Yu-Ting Cheng - Hsinchu City, TW
Kenneth Ocheltree - Ossining NY, US
Robert Montoye - Austin TX, US
International Classification:
H01L 23/48
Abstract:
A carrier structure and method for fabricating a carrier structure with through-vias each having a conductive structure with an effective coefficient of thermal expansion which is less than or closely matched to that of the substrate, and having an effective elastic modulus value which is less than or closely matches that of the substrate. The conductive structure may include concentric via fill areas having differing materials disposed concentrically therein, a core of the substrate material surrounded by an annular ring of conductive material, a core of CTE-matched non-conductive material surrounded by an annular ring of conductive material, a conductive via having an inner void with low CTE, or a full fill of a conductive composite material such as a metal-ceramic paste which has been sintered or fused.