Inventors:
Milind S. Bhagavat - Fremont CA, US
Seyed Mahdi Saeidi - Irvine CA, US
Tak Sang Yeung - Irvine CA, US
Assignee:
BROADCOM CORPORATION - Irvine CA
International Classification:
H05K 7/20
Abstract:
Methods, systems, and apparatuses are described for cooling electronic devices. The electrical device includes an integrated circuit die (IC) having opposing first and second surfaces, a plurality of interconnects on the second surface of the IC die that enable the IC die to be coupled to a substrate, and a flexural plate wave device. The flexural plate wave device is configured to generate a stream of air to flow across the electrical device to cool the IC die during operation of the IC die.