Scott A Benedict

7150713, Dec 19, 2006

Oct 16, 2003

10/685590

Cemal Shener - Woburn MA, US
Scott M. Benedict - Nashua NH, US

Smith & Nephew, Inc. - Memphis TN

A61B 1/015
A61B 1/018

600156, 600104, 600128, 600129, 600105, 600561, 604 43

An endoscopic device for use at a site within a body includes an inner portion and a sheath surrounding the inner portion. The inner portion defines an operative channel and an optical channel. The operative channel provides a path for fluid to or from the body site. The sheath defines a pressure-sensing channel and a fluid channel that provides a path for fluid to or from the body site. The pressure-sensing channel and the fluid channel are defined between the sheath and the inner portion. The pressure-sensing channel is configured to couple to a pressure sensor to sense pressure at the body site.

20120076935, Mar 29, 2012

Feb 25, 2011

13/035534

Junhua Ding - Tewksbury MA, US
Scott Benedict - Nashua NH, US
Jaroslaw Pisera - Bedford MA, US

C23C 16/455
B05C 11/06

4272481, 118704

A pulse gas delivery system for delivering a sequence of pulses of prescribed amounts of gases to a process tool, comprises: (a) a plurality of channels, each including (i) a gas delivery chamber; (ii) an inlet valve connected so as to control gas flowing into the corresponding gas delivery chamber; and (iii) an outlet valve connected so as to control the amount of gas flowing out of the corresponding gas delivery chamber; and (b) a dedicated multiple channel controller configured so as to control the inlet and outlet valves of each of the channels so that pulses of gases in prescribed amounts can be provided to the process tool in a predetermined sequence in accordance with a pulse gas delivery process.

20210082672, Mar 18, 2021

Nov 30, 2020

17/107146

- Andover MA, US
Scott Benedict - Nashua NH, US
Kevin Wenzel - Belmont MA, US

H01J 37/32
F16K 1/22
F16K 3/06
F16K 15/02
F16K 51/02

A vacuum pumping line plasma source is provided. The plasma source includes a body defining a generally cylindrical interior volume extending along a central longitudinal axis. The body has an input port for coupling to an input pumping line, an output port for coupling to an output pumping line, and an interior surface disposed about the generally cylindrical interior volume. The plasma source also includes a supply electrode disposed adjacent to a return electrode, and a barrier dielectric member, a least a portion of which is positioned between the supply electrode and the return electrode. The plasma source further includes a dielectric barrier discharge structure formed from the supply electrode, the return electrode, and the barrier dielectric member. The dielectric barrier discharge structure is adapted to generate a plasma in the generally cylindrical interior volume.

20200124457, Apr 23, 2020

Dec 23, 2019

16/724844

- Andover MA, US
Vladislav Davidkovich - Reading MA, US
Scott Benedict - Nashua NH, US
Gordon Hill - Arlington MA, US

MKS Instruments, Inc. - Andover MA

G01F 9/00
G01N 17/00
F16K 37/00
F16K 51/02

Calibration of a valve in a vacuum system and providing a diagnostic indication in the vacuum system using the calibration includes measuring conductance of the valve as a function of angular valve position and generating a conductance calibration map or function for use during operation of the valve. An actual angular valve position is set based on the received set point angular valve position and a difference between the measured valve conductance and a predefined metric of conductance versus angular valve position. An actual system conductance and a difference between the actual system conductance and a reference system conductance for the system are determined. The diagnostic indication of a fault in the system is generated based on the actual angular valve position of the valve and the difference between the actual system conductance and the reference system conductance for the system.

20200075298, Mar 5, 2020

Nov 11, 2019

16/679640

- Andover MA, US
Scott Benedict - Nashua NH, US
Kevin Wenzel - Belmont MA, US

H01J 37/32
F16K 51/02
F16K 15/02
F16K 3/06
F16K 1/22

A vacuum pumping line plasma source is provided. The plasma source includes a body defining a generally cylindrical interior volume extending along a central longitudinal axis. The body has an input port for coupling to an input pumping line, an output port for coupling to an output pumping line, and an interior surface disposed about the generally cylindrical interior volume. The plasma source also includes a supply electrode disposed adjacent to a return electrode, and a barrier dielectric member, a least a portion of which is positioned between the supply electrode and the return electrode. The plasma source further includes a dielectric barrier discharge structure formed from the supply electrode, the return electrode, and the barrier dielectric member. The dielectric barrier discharge structure is adapted to generate a plasma in the generally cylindrical interior volume.

20170328756, Nov 16, 2017

Apr 28, 2017

15/581875

- Andover MA, US
Vladislav Davidkovich - Reading MA, US
Scott Benedict - Nashua NH, US
Gordon Hill - Arlington MA, US

MKS Instruments, Inc. - Andover MA

G01F 9/00
G01N 17/00

Calibration of a valve in a vacuum system and providing a diagnostic indication in the vacuum system using the calibration includes measuring conductance of the valve as a function of angular valve position and generating a conductance calibration map or function for use during operation of the valve. An actual angular valve position is set based on the received set point angular valve position and a difference between the measured valve conductance and a predefined metric of conductance versus angular valve position. An actual system conductance and a difference between the actual system conductance and a reference system conductance for the system are determined. The diagnostic indication of a fault in the system is generated based on the actual angular valve position of the valve and the difference between the actual system conductance and the reference system conductance for the system.

20170200591, Jul 13, 2017

Jan 12, 2017

15/404457

- Andover MA, US
Scott Benedict - Nashua NH, US
Kevin Wenzel - Belmont MA, US

H01J 37/32
F16K 51/02
F16K 15/02
F16K 1/22
F16K 3/06

A vacuum pumping line plasma source is provided. The plasma source includes a body defining a generally cylindrical interior volume extending along a central longitudinal axis. The body has an input port for coupling to an input pumping line, an output port for coupling to an output pumping line, and an interior surface disposed about the generally cylindrical interior volume. The plasma source also includes a supply electrode disposed adjacent to a return electrode, and a barrier dielectric member, a least a portion of which is positioned between the supply electrode and the return electrode. The plasma source further includes a dielectric barrier discharge structure formed from the supply electrode, the return electrode, and the barrier dielectric member. The dielectric barrier discharge structure is adapted to generate a plasma in the generally cylindrical interior volume.