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Ron Serisky Serisky

from Melrose, MA
Age ~57

Ron Serisky Phones & Addresses

  • 10 Hawthorne St, Melrose, MA 02176 (781) 665-9667
  • Quincy, MA
  • Marshfield, MA
  • Memphis, TN
  • 10 Hawthorne St, Melrose, MA 02176 (781) 983-9010

Work

Company: Applied materials Mar 2006 Position: Engineering manager

Education

Degree: BSME School / High School: Northeastern University 1990 to 1996 Specialities: Mechanical Engineering

Skills

Semiconductors • Engineering • Engineering Management • Design of Experiments • Manufacturing • Design For Manufacturing • Failure Analysis • Spc • Mechanical Engineering • Pro Engineer • Electronics • Cross Functional Team Leadership

Industries

Semiconductors

Resumes

Resumes

Ron Serisky Photo 1

Engineering Manager

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Location:
Boston, MA
Industry:
Semiconductors
Work:
Applied Materials since Mar 2006
Engineering Manager

Varian Semiconductor Dec 2004 - Mar 2006
Principal Mechanical Engineer

Varian Semiconductor Apr 2000 - Dec 2004
Senior Mechanical Engineer

Varian Semiconductor Mar 1996 - Apr 2000
Senior Manufacturing Engineer

Raytheon Missile Systems Mar 1995 - Mar 1996
Mechanical Engineer
Education:
Northeastern University 1990 - 1996
BSME, Mechanical Engineering
Northeastern University 1985 - 1990
BSMET, Mechanical Engineering Technology
Skills:
Semiconductors
Engineering
Engineering Management
Design of Experiments
Manufacturing
Design For Manufacturing
Failure Analysis
Spc
Mechanical Engineering
Pro Engineer
Electronics
Cross Functional Team Leadership

Publications

Us Patents

In-Vacuum Protective Liners

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US Patent:
20090179158, Jul 16, 2009
Filed:
Jan 14, 2009
Appl. No.:
12/353642
Inventors:
Lyudmila Stone - Lynnfield MA, US
Julian G. Blake - Gloucester MA, US
Dale K. Stone - Lynnfield MA, US
Ron S. Serisky - Melrose MA, US
Assignee:
VARIAN SEMICONDUCTOR EQUPIMENT ASSOCIATE, INC. - Gloucester MA
International Classification:
H01J 27/00
G21K 1/00
H01J 49/00
US Classification:
250423 R, 250424, 2505051, 250281
Abstract:
This device has a liner disposed on a face in a vacuum chamber. A component in the vacuum chamber defines the face. The liner is configured to protect the workpiece from contamination or to prevent blistering of the face caused by implantation of atoms or ions into the face. The liner may be disposable and removed from the face in the vacuum chamber and replaced with a new liner in some embodiments. This liner may be a polymer with a roughened surface, be carbon-based, or be composed of carbon nanotubes in some embodiments.

Carbon Nanotube Electrostatic Chuck

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US Patent:
20210225682, Jul 22, 2021
Filed:
Jan 22, 2020
Appl. No.:
16/749336
Inventors:
- Santa Clara CA, US
Steven M. Anella - Newbury MA, US
Qin Chen - Gloucester MA, US
Ron Serisky - Gloucester MA, US
Julian G. Blake - Gloucester MA, US
David J. Chipman - Lynn MA, US
International Classification:
H01L 21/683
B23Q 3/154
Abstract:
A platen having improved thermal conductivity and reduced friction is disclosed. In one embodiment, vertically aligned carbon nanotubes are grown on the top surface of the platen. The carbon nanotubes have excellent thermal conductivity, thus improving the transfer of heat between the platen and the workpiece. Furthermore, the friction between the carbon nanotubes and the workpiece is much lower than that with conventional embossments, reducing particle generation. In another embodiment, a support plate is disposed on the platen, wherein the carbon nanotubes are disposed on the top surface of the support plate.

Enhanced Substrate Temperature Measurement Apparatus, System And Method

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US Patent:
20200378837, Dec 3, 2020
Filed:
Sep 4, 2019
Appl. No.:
16/560566
Inventors:
- Santa Clara CA, US
D. Jeffrey Lischer - Gloucester MA, US
Qin Chen - Gloucester MA, US
Dale K. Stone - Lynnfield MA, US
Lyudmila Stone - Lynnfield MA, US
Steven Anella - West Newbury MA, US
Ron Serisky - Gloucester MA, US
Chi-Yang Cheng - Gloucester MA, US
Assignee:
APPLIED Materials, Inc. - Santa Clara CA
International Classification:
G01K 1/16
G01K 7/02
G01J 5/10
G01J 5/02
Abstract:
A temperature measurement apparatus. The temperature measurement apparatus may include a temperature sensor body, the temperature sensor body having a substrate support surface; and a heat transfer layer, disposed on the substrate support surface, the heat transfer layer comprising an array of aligned carbon nanotubes.

System And Apparatus For Enhanced Substrate Heating And Rapid Substrate Cooling

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US Patent:
20200381271, Dec 3, 2020
Filed:
Sep 4, 2019
Appl. No.:
16/560326
Inventors:
- Santa Clara CA, US
Dale K. Stone - Lynnfield MA, US
D. Jeffrey Lischer - Gloucester MA, US
Lyudmila Stone - Lynnfield MA, US
Steven Anella - West Newbury MA, US
Julian G. Blake - Gloucester MA, US
Ron Serisky - Gloucester MA, US
Daniel A. Hall - West Newbury MA, US
Robert H. Bettencourt - Gloucester MA, US
Assignee:
APPLIED Materials, Inc. - Santa Clara CA
International Classification:
H01L 21/67
H05B 1/02
Abstract:
A heating system for heating a substrate. The heating system may include a susceptor, where the susceptor has a substrate support surface. The heating system may further include a heat transfer layer, disposed on the substrate support surface, where the heat transfer layer comprising an array of aligned carbon nanotubes.
Ron Serisky Serisky from Melrose, MA, age ~57 Get Report