Inventors:
Rajesh Kelekar - Los Altos CA, US
Assignee:
Intermolecular, Inc. - San Jose CA
International Classification:
H01L 21/66
C25D 5/02
C25B 15/08
B05B 7/06
US Classification:
438678, 118313, 205126, 366196, 366315, 366317, 366343, 427437
Abstract:
An apparatus and system for stirring liquid inside a flow cell. In one implementation, the apparatus includes a rotatable disc configured to receive liquid at a top side of the disc and distribute the liquid substantially evenly around a periphery of the flow cell. The disc has a triangular cross sectional area. The apparatus may further include a set of fins attached to a bottom side of the disc, wherein the set of fins is configured to draw the liquid from the periphery of the flow cell into the center of the flow cell.