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Rajesh D Kelekar

from Menlo Park, CA
Age ~48

Rajesh Kelekar Phones & Addresses

  • 827 Roble Ave APT 3, Menlo Park, CA 94025
  • Los Altos, CA
  • Palo Alto, CA
  • Berkeley, CA
  • Victorville, CA
  • Apple Valley, CA
  • Providence, RI

Publications

Us Patents

Stirring Apparatus For Combinatorial Processing

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US Patent:
8058171, Nov 15, 2011
Filed:
Jun 17, 2008
Appl. No.:
12/140926
Inventors:
Rajesh Kelekar - Los Altos CA, US
Assignee:
Intermolecular, Inc. - San Jose CA
International Classification:
H01L 21/66
C25D 5/02
C25B 15/08
B05B 7/06
US Classification:
438678, 118313, 205126, 366196, 366315, 366317, 366343, 427437
Abstract:
An apparatus and system for stirring liquid inside a flow cell. In one implementation, the apparatus includes a rotatable disc configured to receive liquid at a top side of the disc and distribute the liquid substantially evenly around a periphery of the flow cell. The disc has a triangular cross sectional area. The apparatus may further include a set of fins attached to a bottom side of the disc, wherein the set of fins is configured to draw the liquid from the periphery of the flow cell into the center of the flow cell.

Measuring Volume Of A Liquid Dispensed Into A Vessel

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US Patent:
8220502, Jul 17, 2012
Filed:
Dec 28, 2007
Appl. No.:
11/966654
Inventors:
Rajesh Kelekar - Los Altos CA, US
Gaurav Verma - Sunnyvale CA, US
Kurt Weiner - San Jose CA, US
Assignee:
Intermolecular, Inc. - San Jose CA
International Classification:
G01F 22/02
US Classification:
141 5, 141 95, 222 71, 702 55
Abstract:
A pressure gauge may be coupled to a vessel into which a liquid chemical is to be dispensed. The volume of the vessel may be known and a control device may determine an initial pressure of the vessel using the pressure gauge. A volume of liquid chemical may be dispensed into the vessel which may cause the pressure within the vessel to increase to a second pressure. The control device may determine the second pressure using the pressure gauge may calculate the volume of liquid chemical dispensed into the vessel using the volume of the vessel, the initial pressure of the vessel, and the second pressure of the vessel.

Preparing A Chemical Delivery Line Of A Chemical Dispense System For Delivery

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US Patent:
8234012, Jul 31, 2012
Filed:
Sep 26, 2008
Appl. No.:
12/239567
Inventors:
Rajesh Kelekar - Los Altos CA, US
Assignee:
Intermolecular, Inc. - San Jose CA
International Classification:
G05D 9/00
US Classification:
700281, 222 1, 702 55
Abstract:
Method for preparing a chemical delivery line for delivery. In one implementation, the method may include starting a flow of a semiconductor solution from a vessel into the chemical delivery line coupled to the vessel, measuring a volume of the semiconductor solution flowing through the chemical delivery line, and performing a subsequent process when the volume of the semiconductor solution is equal to or greater than the volume of the chemical delivery line.

Stirring Apparatus For Combinatorial Processing

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US Patent:
8298621, Oct 30, 2012
Filed:
Oct 27, 2011
Appl. No.:
13/283444
Inventors:
Rajesh Kelekar - Los Altos CA, US
Assignee:
Intermolecular, Inc. - San Jose CA
International Classification:
H01L 21/66
C25D 5/02
C25B 15/08
B05B 7/06
US Classification:
427437, 118313, 205126, 366196, 366315, 366317, 366343, 438678
Abstract:
An apparatus and system for stirring liquid inside a flow cell. In one implementation, the apparatus includes a rotatable disc configured to receive liquid at a top side of the disc and distribute the liquid substantially evenly around a periphery of the flow cell. The disc has a triangular cross sectional area. The apparatus may further include a set of fins attached to a bottom side of the disc, wherein the set of fins is configured to draw the liquid from the periphery of the flow cell into the center of the flow cell.

Emissivity Profile Control For Thermal Uniformity

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US Patent:
8465590, Jun 18, 2013
Filed:
Feb 1, 2011
Appl. No.:
13/019268
Inventors:
Rajesh Kelekar - Los Altos CA, US
Assignee:
Intermolecular, Inc. - San Jose CA
International Classification:
H05B 6/10
US Classification:
118715, 374 2
Abstract:
A substrate for processing in a heating system is disclosed. The substrate includes a bottom portion for absorbing heat from a radiating heat source, the bottom portion having a first region having a first emissivity and a second region having a second emissivity less than the first emissivity. The first region and the second region promote thermal uniformity of the substrate by compensating for thermal non-uniformity of the radiating heat source.

Measuring Volume Of A Liquid Dispensed Into A Vessel

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US Patent:
8528608, Sep 10, 2013
Filed:
Jun 8, 2012
Appl. No.:
13/492477
Inventors:
Rajesh Kelekar - Los Altos CA, US
Guarav Verma - San Jose CA, US
Kurt Weiner - San Jose CA, US
Assignee:
Intermolecular, Inc. - San Jose CA
International Classification:
G01F 22/02
US Classification:
141 95, 222 71, 702 55
Abstract:
A pressure gauge may be coupled to a vessel into which a liquid chemical is to be dispensed. The volume of the vessel may be known and a control device may determine an initial pressure of the vessel using the pressure gauge. A volume of liquid chemical may be dispensed into the vessel which may cause the pressure within the vessel to increase to a second pressure. The control device may determine the second pressure using the pressure gauge may calculate the volume of liquid chemical dispensed into the vessel using the volume of the vessel, the initial pressure of the vessel, and the second pressure of the vessel.

Calibration Of A Chemical Dispense System

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US Patent:
8561627, Oct 22, 2013
Filed:
Sep 26, 2008
Appl. No.:
12/239555
Inventors:
Rajesh Kelekar - Los Altos CA, US
Assignee:
Intermolecular, Inc. - San Jose CA
International Classification:
F16K 31/02
US Classification:
137 12, 137 14, 1374875, 13756511, 13756513, 417 442
Abstract:
Method for providing a fluid at a target pressure. In one implementation, the method may include providing a semiconductor solution at a velocity to a supply line through a dispenser, measuring a pressure of the semiconductor solution flowing through the supply line, comparing the measured pressure with the target pressure, and adjusting the velocity based on the results of the comparison.

Maintaining Flow Rate Of A Fluid

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US Patent:
20110303696, Dec 15, 2011
Filed:
Aug 22, 2011
Appl. No.:
13/214426
Inventors:
Rajesh Kelekar - Los Altos CA, US
Gaurav Verma - Sunnyvale CA, US
Kurt Weiner - San Jose CA, US
Assignee:
INTERMOLECULAR, INC. - San Jose CA
International Classification:
B67D 1/00
US Classification:
222 59
Abstract:
A pressure gauge may be coupled to a supply line which carries liquid from a bottle to either one or more mixing vessels and/or one or more reactors in a combinatorial processing tool. A control device may monitor the pressure measured by the pressure gauge, and the control device may be configured to change the pressure supplied to the bottle based on a comparison of the measured pressure to a predetermined pressure value. The control device may adjust the pressure provided to the bottle using a pressure regulator coupled to the pressure source. By changing the pressure provided to the bottle, the control device may maintain a relatively constant flow rate of fluids from the liquid source into one or more mixing vessels and/or the one or more reactors.
Rajesh D Kelekar from Menlo Park, CA, age ~48 Get Report