Qinian Qi Phones & Addresses
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40862 Sardis St, Fremont, CA 94538 (510) 438-8835
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Milpitas, CA
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Alameda, CA
Publications
Us Patents
Wavelength Tunable Mems-Fabry Perot Filter
View pageUS Patent:
20150153563, Jun 4, 2015
Filed:
Nov 25, 2014
Appl. No.:
14/553807
Inventors:
- Livermore CA, US
Tongning Li - Fremont CA, US
David Eu - Fremont CA, US
Qinian Qi - Fremont CA, US
Tongning Li - Fremont CA, US
David Eu - Fremont CA, US
Qinian Qi - Fremont CA, US
International Classification:
G02B 26/00
H01S 5/022
B81C 1/00
H01S 3/08
H01S 5/022
B81C 1/00
H01S 3/08
Abstract:
A wavelength tunable gain medium with the use of micro-electromechanical system (MEMS) based Fabry-Perot (FP) filter cavity tuning is provided as a tunable laser. The system comprises a laser cavity and a filter cavity for wavelength selection. The laser cavity consists of a gain medium such as a Semiconductor Optical Amplifier (SOA), two collimating lenses and an end reflector. The MEMS-FP filter cavity comprises a fixed reflector and a moveable reflector, controllable by electrostatic force. By moving the MEMS reflector, the wavelength can be tuned by changing the FP filter cavity length. The MEMS FP filter cavity displacement can be tuned discretely with a step voltage, or continuously by using a continuous driving voltage. The driving frequency for continuous tuning can be a resonance frequency or any other frequency of the MEMS structure, and the tuning range can cover different tuning ranges such as 30 nm, 40 nm, and more than 100 nm.