Philip V Kaszuba

7205237, Apr 17, 2007

Jul 5, 2005

11/160667

Andrew Deering - Swanton VT, US
Terence L. Kane - Port Chester NY, US
Philip V. Kaszuba - Essex Junction VT, US
Leon Moszkowicz - Milton VT, US
Carmelo F. Scrudato - Ossining NY, US
Michael Tenney - Poughkeepsie NY, US

International Business Machines Corporation - Armonk NY

H01L 21/461
C23F 1/00

438690, 438712, 216 63, 216 66

Apparatus for exposure and probing of features in a semiconductor workpiece includes a hollow concentrator for covering a portion of the workpiece connected by a gas conduit to a supply of etchant gas. A stage supports and positions the semiconductor workpiece. Control means moves the stage and the semiconductor workpiece to the series of positions sequentially. An energy beam source directs a focused energy beam through an aperture through the concentrator onto a region on the surface of the workpiece in the presence of the etchant gas. The control means moves the stage to a series of positions with respect to the concentrator and the energy beam to direct the energy beam in the presence of the etchant gas to expose a series of regions on the surface of the semiconductor workpiece positioned below the hollow interior space of the concentrator, sequentially.

7507591, Mar 24, 2009

Jun 8, 2005

11/160086

Andrew Deering - Swanton VT, US
Philip V. Kaszuba - Essex Junction VT, US
Leon Moszkowicz - Milton VT, US
James Robert - Burlington VT, US
James A. Slinkman - Montpelier VT, US

International Business Machines Corporation - Armonk NY

H01L 21/00
G01M 19/00

438 14, 738658

A method for measuring an integrated circuit (IC) structure by measuring an imprint of the structure, a method for preparing a test site for the above measuring, and IC so formed. The method for preparing the test site includes incrementally removing the structure from the substrate so as to reveal an imprint of the removed bottom surface of the structure in a top surface of the substrate. The imprint can then be imaged using an atomic force microscope (AFM). The image can be used to measure the bottom surface of the structure.

7511510, Mar 31, 2009

Nov 30, 2005

11/164654

Philip V. Kaszuba - Essex Junction VT, US
Theodore M. Levin - Burlington VT, US
David P. Vallett - Fairfax VT, US

International Business Machines Corporation - Armonk NY

H01H 31/02
G01R 27/08
G01R 31/02

324555, 324715, 324754

Disclosed is a fault isolation and measurement system that provides multiple near-field scanning isolation techniques on a common platform. The system incorporates the use of a specialized holder to supply electrical bias to internal circuit structures located within an area of a device or material. The system further uses a multi-probe assembly. Each probe is mounted to a support structure around a common reference point and is a component of a different measurement or fault isolation tool. The assembly moves such that each probe can obtain measurements from the same fixed location on the device or material. The relative positioning of the support structure and/or the holder can be changed in order to obtain measurements from multiple same fixed locations within the area. Additionally, the system uses a processor for providing layered images associated with each signal and for precisely aligning those images with design data in order to characterize, or isolate fault locations within the device or material.

7671604, Mar 2, 2010

May 7, 2008

12/116497

Philip V. Kaszuba - Essex Junction VT, US
Theodore M. Levin - Burlington VT, US
David P. Vallett - Fairfax VT, US

International Business Machines Corporation - Armonk NY

H01H 31/02
G01R 27/08
G01R 31/02

324555, 324715, 324754

Disclosed is a fault isolation and measurement system that provides multiple near-field scanning isolation techniques on a common platform. The system incorporates the use of a specialized holder to supply electrical bias to internal circuit structures located within an area of a device or material. The system further uses a multi-probe assembly. Each probe is mounted to a support structure around a common reference point and is a component of a different measurement or fault isolation tool. The assembly moves such that each probe can obtain measurements from the same fixed location on the device or material. The relative positioning of the support structure and/or the holder can be changed in order to obtain measurements from multiple same fixed locations within the area. Additionally, the system uses a processor for providing layered images associated with each signal and for precisely aligning those images with design data in order to characterize, or isolate fault locations within the device or material.

7812347, Oct 12, 2010

Mar 7, 2008

12/044030

Andrew Deering - Swanton VT, US
Philip V. Kaszuba - Essex Junction VT, US
Leon Moszkowicz - Milton VT, US
James Robert - Burlington VT, US
James A. Slinkman - Montpelier VT, US

International Business Machines Corporation - Armonk NY

H01L 23/58

257 48

A method for measuring an integrated circuit (IC) structure by measuring an imprint of the structure, a method for preparing a test site for the above measuring, and IC so formed. The method for preparing the test site includes incrementally removing the structure from the substrate so as to reveal an imprint of the removed bottom surface of the structure in a top surface of the substrate. The imprint can then be imaged using an atomic force microscope (AFM). The image can be used to measure the bottom surface of the structure.

7944550, May 17, 2011

Feb 29, 2008

12/039830

Lloyd Bumm - Norman OK, US
Philip V. Kaszuba - Essex Junction VT, US
Leon Moszkowicz - Milton VT, US
James A. Slinkman - Montpelier VT, US

International Business Machines Corporation - Armonk NY

G01B 11/16

356 32, 32475405, 32475507, 32475022, 73760

A method of detecting local mechanical stress in integrated devices is provided, the method comprising: enabling the detection of a photovoltage difference between a scan probe device and a surface portion of an integrated device, the scan probe device being configured to deflect in response to the photovoltage difference; measuring the deflection of the scan probe device in response to the photovoltage difference between the scan probe device and the surface portion of the integrated device; and calculating a local stress level within the integrated device by determining a local work function of the surface portion of the integrated device based upon the deflection of the scan probe device.

61397598, Oct 31, 2000

Feb 23, 1999

9/256261

Lambert A. Doezema - San Antonio TX
Philip V. Kaszuba - Essex Junction VT
Leon Moszkowicz - Stowe VT
James M. Never - Essex Junction VT
James A. Slinkman - Montpelier VT

International Business Machines Corporation - Armonk NY

C25F 308

216 11

A micromechanical sensor probe for a scanned-probe tool comprising a silicon probe and a coating of a refractory metal silicide formed at least on the tip of the probe. Titanium silicide is preferred. A method for manufacturing such a probe includes the steps of, first, providing a silicon cantilever and tip combination and, second, forming a refractory metal silicide on at least the tip of the cantilever and tip combination. This second step of the method includes removing any remnant oxide from the tip, stabilizing the cantilever and tip combination on a carrier, depositing a refractory metal on the silicon tip, heating the cantilever and tip combination in an ambient free of oxygen to react chemically the refractory metal on and the silicon of the tip, selectively etching any unreacted refractory metal from the tip, and annealing the cantilever and tip combination in an ambient free of oxygen. The method may also include, as a final step, removing any unreacted refractory metal from the tip.

61983004, Mar 6, 2001

Nov 8, 1999

9/436122

Lambert A. Doezema - San Antonio TX
Philip V. Kaszuba - Essex Junction VT
Leon Moszkowicz - Stowe VT
James M. Never - Essex Junction VT
James A. Slinkman - Montpelier VT

International Business Machines Corporation - Armonk NY

G01R 3102

324762

A micromechanical sensor probe for a scanned-probe tool includes a silicon cantilever and a silicon tip physically attached to the cantilever. The micromechanical sensor probe has a coating of a refractory metal silicide formed at least on the tip. Titanium silicide is preferred. The probe also has a layer of refractory metal nitride formed entirely over the refractory metal silicide.