US Patent:
20190277774, Sep 12, 2019
Inventors:
- Corning NY, US
Uta-Barbara Goers - Campbell NY, US
En Hong - Painted Post NY, US
Sung-chan Hwang - Cheonal-si, KR
Ji Hwa Jung - Seoul, KR
Tae-ho Keem - Seongnam-si, KR
Philip Robert LeBlanc - Corning NY, US
Hyeong-cheol Lee - Cheonan-si, KR
Michal Mlejnek - Big Flats NY, US
Johannes Moll - Corning NY, US
Rajeshkannan Palanisamy - Painted Post NY, US
Sung-jong Pyo - Asan-si, KR
Amanda Kathryn Thomas - Corning NY, US
Correy Robert Ustanik - Davidson NC, US
International Classification:
G01N 21/896
G01N 21/958
Abstract:
A method of inspecting defects on a transparent substrate may include: selecting a gradient of an illumination optical system so that light incident on the transparent substrate has a first angle; selecting a gradient of a detection optical system so that an optical axis of the detection optical system located over the transparent substrate has a second angle, which is equal to or less than the first angle; adjusting a position of at least one of the illumination optical system, the transparent substrate, and the detection optical system so that a field-of-view of the detection optical system covers a first region where the light meets a first surface of the transparent substrate and does not cover a second region where light meets a second surface of the transparent substrate, the second surface being opposite to the first surface; illuminating the transparent substrate; and detecting light scattered from the transparent substrate.