Inventors:
Srinivas Doddi - Fremont CA, US
Lawrence Lane - San Jose CA, US
Vi Vuong - Fremont CA, US
Michael Laughery - Austin TX, US
Junwei Bao - Palo Alto CA, US
Kelly Barry - Saratoga CA, US
Nickhil Jakatdar - Los Altos CA, US
Emmanuel Drege - San Jose CA, US
Assignee:
Timbre Technologies, Inc. - Santa Clara CA
International Classification:
G01R 13/00
G01R 31/26
US Classification:
702196, 702 66, 702159, 702172, 438 16
Abstract:
Specific wavelengths to use in optical metrology of an integrated circuit can be selected using one or more selection criteria and termination criteria. Wavelengths are selected using the selection criteria, and the selection of wavelengths is iterated until the termination criteria are met.