Resumes
Resumes
Mei Shen
View pageLocation:
United States
Mei Shen Phones & Addresses
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20167 Las Ondas Way, Cupertino, CA 95014 (408) 921-1780
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7150 Rainbow Dr, San Jose, CA 95129
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Daly City, CA
Business Records
Name / Title
Company / Classification
Phones & Addresses
President
REDDING PARK HOMEOWNERS ASSOCIATION
500 E Calaveras Blvd STE 333, Milpitas, CA 95035
828 S Bascom Ave, San Jose, CA 95128
1040 E El Camino Real, Sunnyvale, CA 94087
828 S Bascom Ave, San Jose, CA 95128
1040 E El Camino Real, Sunnyvale, CA 94087
Publications
Us Patents
Method For Etching High Dielectric Constant Materials
View pageUS Patent:
20070042601, Feb 22, 2007
Filed:
Aug 22, 2005
Appl. No.:
11/208573
Inventors:
Xikun Wang - Sunnyvale CA, US
Wei Liu - San Jose CA, US
Yan Du - Santa Clara CA, US
Mei Shen - Fremont CA, US
Wei Liu - San Jose CA, US
Yan Du - Santa Clara CA, US
Mei Shen - Fremont CA, US
International Classification:
H01L 21/302
H01L 21/461
H01L 21/461
US Classification:
438689000, 438706000, 438707000, 438710000, 438712000, 438722000, 257E21214
Abstract:
In one implementation, a method is provided for etching a high k dielectric material in a plasma etch reactor, the method comprising plasma etching the high k dielectric material with a first plasma gas reactant mixture having BCl. The high k dielectric material may include AlOin a stack having a silicon layer. The etching may include supplying a passivation gas, for example CH, and may further include supplying a diluent gas such as a noble gas, for example He. In some implementations, the etching may be performed with a reactive ion etch process.