Inventors:
Mark J. Jerolimov - Cupertino CA
Quincy D. Allison - Boulder Creek CA
Assignee:
H-Square Corporation - Sunnyvale CA
International Classification:
B65G 4724
Abstract:
An orientation apparatus for aligning indexing notches of disk-shaped members, such as semiconductor wafers, includes a flexible alignment rod that imparts rotation of the disk-shaped members until the indexing notches are registered with the alignment rod. The alignment rod is captured by a displaceable comb member that exposes regions of the rod between adjacent teeth. The teeth ensure that the disk-shaped members are properly aligned. The comb member has a raised operation position in which the disk-shaped members are spaced apart from rollers and has a lowered retracted position in which the weight of the disk-shaped members is transferred to the rollers. A camming mechanism may be used to raise and lower the comb member and alignment rod between the two positions.