Inventors:
Lawrence H. Domash - Conway MA, US
Adam M. Payne - Conway MA, US
Eugene Y. Ma - Brookline MA, US
Nikolay Nemchuk - North Andover MA, US
Ming Wu - Princeton NJ, US
Robert Murano - Malden MA, US
Steven Sherman - Arlington MA, US
Matthias Wagner - Boston MA, US
Assignee:
Aegis Semiconductor, Inc. - Woburn MA
International Classification:
G01B 9/02
Abstract:
An optical instrument including: a thermo-optically tunable, thin film, free-space interference filter having a tunable passband which functions as a wavelength selector, the filter including a sequence of alternating layers of amorphous silicon and a dielectric material deposited one on top of the other and forming a Fabry-Perot cavity structure having: a first multi-layer thin film interference structure forming a first mirror; a thin-film spacer layer deposited on top of the first multi-layer interference structure, the thin-film spacer layer made of amorphous silicon; and a second multi-layer thin film interference structure deposited on top of the thin-film spacer layer and forming a second mirror; a lens for coupling an optical beam into the filter; an optical detector for receiving the optical beam after the optical beam has interacted with the interference filter; and circuitry for heating the thermo-optically tunable interference filter to control a location of the passband.