Inventors:
Anupama B. Kaul - Arcadia CA, US
Eric W. Wong - Los Angeles CA, US
Richard L. Baron - Verdugo City CA, US
Larry Epp - Pasadena CA, US
Assignee:
California Institute of Technology - Pasadena CA
International Classification:
B81B 7/02
H01L 21/44
US Classification:
438684, 438685, 438903, 438FOR 248, 257382, 257383, 977876, 977938, 333193
Abstract:
Switches having an in situ grown carbon nanotube as an element thereof, and methods of fabricating such switches. A carbon nanotube is grown in situ in mechanical connection with a conductive substrate, such as a heavily doped silicon wafer or an SOI wafer. The carbon nanotube is electrically connected at one location to a terminal. At another location of the carbon nanotube there is situated a pull electrode that can be used to elecrostatically displace the carbon nanotube so that it selectively makes contact with either the pull electrode or with a contact electrode. Connection to the pull electrode is sufficient to operate the device as a simple switch, while connection to a contact electrode is useful to operate the device in a manner analogous to a relay. In various embodiments, the devices disclosed are useful as at least switches for various signals, multi-state memory, computational devices, and multiplexers.