Inventors:
April D. Schricker - Palo Alto CA, US
Wu-Yi Chien - San Jose CA, US
Kun Hou - Milpitas CA, US
Raghuveer S. Makala - Sunnyvale CA, US
Jingyan Zhang - Santa Clara CA, US
Yibo Nian - Palo Alto CA, US
International Classification:
H01L 29/16
H01L 21/20
B82Y 40/00
B82Y 99/00
US Classification:
257 9, 438384, 977842, 977742, 257E2109, 257E29082
Abstract:
In some aspects, a method of fabricating a memory cell is provided that includes fabricating a steering element above a substrate, and fabricating a reversible-resistance switching element coupled to the steering element by selectively fabricating carbon nano-tube (“CNT”) material above the substrate, wherein the CNT material comprises a single CNT. Numerous other aspects are provided.