Inventors:
David Ross Greenberg - White Plains NY, US
John Joseph Pekarik - Underhill VT, US
Jorg Scholvin - Cambridge MA, US
Assignee:
International Business Machines Corporation - Armonk NY
International Classification:
H01L 29/41
US Classification:
257211, 257203, 257207, 257208, 257750, 257752, 257758, 257767, 257774, 257E23142, 257E23143, 257E23144, 257E23145, 257E23151, 257E23152, 257E23153
Abstract:
Multilevel metallization layouts for an integrated circuit chip including transistors having first, second and third elements to which metallization layouts connect. The layouts minimize current limiting mechanism including electromigration by positioning the connection for the second contact vertically from the chip, overlapping the planes and fingers of the metallization layouts to the first and second elements and forming a pyramid or staircase of multilevel metallization layers to smooth diagonal current flow.