Inventors:
Fariborz Assaderaghi - Mahopac NY
Louis Lu-Chen Hsu - Fishkill NY
Jack A. Mandelman - Stormville NY
Assignee:
International Business Machines Corporation - Armonk NY
International Classification:
H01L 2701
Abstract:
A semiconductor memory device including an NVRAM cell structure, a DRAM cell structure and an SRAM cell structure. The NVRAM cell structure, the DRAM cell structure, and the SRAM cell structure are on the same semiconductor on insulator substrate. An NVRAM cell structure. Processes for forming a memory structure that includes NVRAM, DRAM, and/or SRAM memory structures on one semiconductor on insulator substrate and processes for forming a new NVRAM cell structure. Preferably, the semiconductor-on-insulator substrate is an SOI substrate, a silicon on glass substrate or a silicon on sapphire substrate, as appropriate for a particular application.