David H Uchimura

from Gilbert, AZ

Age ~65

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David Uchimura Phones & Addresses

441 Port Dr, Gilbert, AZ 85233 (480) 497-3686
Phoenix, AZ
Chandler, AZ
441 S Port Dr, Gilbert, AZ 85233 (623) 694-6700

Work

Company: Intel Position: Process engineer

Education

Degree: Bachelors School / High School: Uc San Diego Specialities: Chemical Engineering

Skills

Engineering • Process Engineering • Jmp • Design of Experiments • Manufacturing • Electronics • Cross Functional Team Leadership

Emails

d***a@gmail.com

Industries

Semiconductors

Resumes

Process Engineer

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Location:

Phoenix, AZ

Industry:

Semiconductors

Work:

Intel
Process Engineer

Education:

Uc San Diego
Bachelors, Chemical Engineering

Skills:

Engineering
Process Engineering
Jmp
Design of Experiments
Manufacturing
Electronics
Cross Functional Team Leadership

Publications

Us Patents

Plasma Etch Process

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US Patent:

46785400, Jul 7, 1987

Filed:

Jun 9, 1986

Appl. No.:

6/872073

Inventors:

David H. Uchimura - Chandler AZ

Assignee:

Tegal Corporation - Novato CA

International Classification:

B44C 122

US Classification:

156643

Abstract:

In an aluminum etch process using SiCl. sub. 4 in a plasma reactor, edge profile is controlled by adding predetermined amounts of nitrogen and chlorine. The resulting aniosotropic etch causes walls to have a 60. degree. -90. degree. angle with respect to the substrate. Edge profile is further controlled by tapering the photoresist mask, e. g. by baking.