US Patent:
20080197748, Aug 21, 2008
Inventors:
Matan Naftali - Yoque'am, IL
David Elata - Palo Alto CA, US
Assignee:
TECHNION RESEARCH AND DEVELOPMENT FOUNDATION LTD. - Haifa
International Classification:
H02N 1/00
B81C 1/00
Abstract:
A method for providing a vertical comb drive. The method comprises: fabricating a device comprising rotor comb element, the rotor element comb comprising a main body and a plurality of substantially parallel extensions in a comb arrangement, and at least one of a plurality of stator comb elements, comprising a main body and a plurality of substantially parallel extensions in a comb arrangement, adapted to be interlaced with the rotor, all on a single layer of a substrate.