Inventors:
Richard L. Sandstrom - Encinitas CA, US
Daniel J. W. Brown - San Diego CA, US
Thomas Hofmann - San Diego CA, US
Jason D. Robinson - San Marcos CA, US
Craig W. Unick - San Diego CA, US
Assignee:
CYMER, INC. - San Diego CA
International Classification:
H01S 3/22
Abstract:
An apparatus and method of operation for a high power broad band elongated thin beam laser annealing light source, which may comprise a gas discharge seed laser oscillator having a resonance cavity, providing a seed laser output pulse; a gas discharge amplifier laser amplifying the seed laser output pulse to provide an amplified seed laser pulse output; a divergence correcting multi-optical element optical assembly intermediate the seed laser and the amplifier laser. The divergence correcting optical assembly may adjust the size and/or shape of the seed laser output pulse within a discharge region of the amplifier laser in order to adjust an output parameter of the amplified seed laser pulse output. The divergence correcting optical assembly may comprise a telescope with an adjustable focus. The adjustable telescope may comprise an active feedback-controlled actuator based upon a sensed parameter of the amplified seed laser output from the amplifier laser.
