Chung Po Huang

7228257, Jun 5, 2007

Jun 13, 2003

10/460879

Roger Patrick - Mountain View CA, US
Vincent Wong - Pleasanton CA, US
Chung Ho Huang - San Jose CA, US

Lam Research Corporation - Fremont CA

G06F 19/00

702189, 702 31, 702108, 702117, 702119, 700121, 382144, 382145, 382147

A method of optimizing a set of steps in a semi-conductor processing system comprising a software control program, wherein the semi-conductor processing system includes a first function, a second function, and a third function, and further includes a memory for storing a set of variables, and wherein the set of steps further includes a first step, a second step, and a third step. The invention includes generating the first step on an editor application, wherein the first function is added to the first step, and if required, a first set of user input instructions is added. The invention also includes generating the second step on the editor application, wherein the second function is added to the second step, and if required, a second set of user input instructions is added; and generating the third step on the editor application, wherein the third function is added to the third step, and if required, a third set of user input instructions is added. The invention further includes placing the first step, the second step, and the third step in a proper order; transferring the set of steps to the semi-conductor processing system; executing the set of steps; storing a set of results in the set of variables; and, if required, generating a report from the set of variables.

8185242, May 22, 2012

May 7, 2008

12/116897

Scott Wong - Sunnyvale CA, US
Jeffrey Lin - Hsinchu, TW
Jack Chen - Fremont CA, US
Benjamin W. Mooring - Cedar Park TX, US
Chung Ho Huang - San Jose CA, US

Lam Research Corporation - Fremont CA

G06F 19/00
G06F 17/00
G05B 19/18
G05B 15/00
G05B 19/00

700254, 700114, 700245, 700264, 901 3, 901 40, 901 46

Methods and systems to optimize wafer placement repeatability in semiconductor manufacturing equipment using a controlled series of wafer movements are provided. In one embodiment, a preliminary station calibration is performed to teach a robot position for each station interfaced to facets of a vacuum transfer module used in semiconductor manufacturing. The method also calibrates the system to obtain compensation parameters that take into account the station where the wafer is to be placed, position of sensors in each facet, and offsets derived from performing extend and retract operations of a robot arm. In another embodiment where the robot includes two arms, the method calibrates the system to compensate for differences derived from using one arm or the other. During manufacturing, the wafers are placed in the different stations using the compensation parameters.

20160112390, Apr 21, 2016

Oct 17, 2014

14/517145

- Fremont CA, US
Chad Weetman - Pleasanton CA, US
Paul Ballintine - Pleasanton CA, US
Vincent Wong - Pleasanton CA, US
Chung Ho Huang - San Jose CA, US
Henry T. Chan - San Jose CA, US

H04L 29/06
H04W 4/00

A method for establishing a virtual tether between a mobile device and a semiconductor processing tool, the method including: obtaining, by a mobile device, a unique key associated with the semiconductor processing tool; establishing a unique pairing between the mobile device and the semiconductor processing tool based on the unique key that is obtained by the mobile device; in response to successfully establishing the unique pairing, authenticating a user of the mobile device for access to the semiconductor processing tool; in response to successfully authenticating the user, performing resource arbitration on the semiconductor processing tool which includes reserving one or more resources associated with the semiconductor processing tool based on a level of access granted to the user; monitoring an activity level of the mobile device over a period of time; and comparing the activity level to a predetermined activity level threshold.

20160103445, Apr 14, 2016

Oct 6, 2015

14/876213

- Fremont CA, US
Chung Ho Huang - San Jose CA, US
Simon Gosselin - Menlo Park CA, US
Vincent Wong - Pleasanton CA, US
Ronald Ramnarine - Fremont CA, US
Neal K. Newton - San Jose CA, US
Mukesh Shah - Fremont CA, US
Kerwin Hoversten - San Ramon CA, US
Bob Ahrens - San Jose CA, US
Marco Mora - San Jose CA, US

G05B 19/4065

Integration of semiconductor tool maintenance operations on mobile devices to allow technicians to more accurately perform semiconductor tool maintenance and to allow more accurate analysis of data to improve maintenance procedures to be more repeatable, consistent, and efficient. Remote control of maintenance operations for the semiconductor tool via a portable electronic device decreases the time required to service semiconductor tools and thus increase throughput.