Resumes
Resumes
Christine Kalnas Phones & Addresses
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102 Mountain Dr, Carnegie, PA 15106 (412) 276-2138
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100 Anderson St, Pittsburgh, PA 15212 (412) 231-2241
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1403 Eagles Nest Ln, Monroeville, PA 15146 (412) 373-1172
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10350 Dover St, Broomfield, CO 80021 (303) 469-8243
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Westminster, CO
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Paragould, AR
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Ann Arbor, MI
Work
Position:
Sales Occupations
Publications
Us Patents
Method And Apparatus For Determining The Dielectric Constant Of A Low Permittivity Dielectric On A Semiconductor Wafer
View pageUS Patent:
20050146348, Jul 7, 2005
Filed:
Dec 30, 2003
Appl. No.:
10/749031
Inventors:
William Howland - Wexford PA, US
Christine Kalnas - Pittsburgh PA, US
Christine Kalnas - Pittsburgh PA, US
International Classification:
G01R031/26
US Classification:
324766000
Abstract:
In an apparatus and method for determining a permittivity of a dielectric layer on a semiconductor wafer, a thickness of the dielectric layer is determined and a topside of the wafer is moved into contact with a spherical portion of an at least partially spherical and electrically conductive surface. An electrical stimulus is applied between the electrically conductive surface and the semiconducting material. A capacitance of a capacitor comprised of the electrically conductive surface, the semiconductor material and the dielectric layer is determined from the applied stimulus. A permittivity of the dielectric layer is then determined as a function of the capacitance and the thickness of the dielectric layer.