US Patent:
20130301113, Nov 14, 2013
Inventors:
Keith D. Patterson - Los Angeles CA, US
Chiara Daraio - Pasadena CA, US
Eleftherios Gdoutos - Pasadena CA, US
Namiko Yamamoto - Pasadena CA, US
Risaku Toda - Pasadena CA, US
Victor E. White - Altadena CA, US
Harish Manohara - Arcadia CA, US
John B. Steeves - Pasadena CA, US
International Classification:
G02B 26/08
Abstract:
A deformable mirror is configured to be deformed by surface-parallel actuation. In one embodiment, the deformable mirror includes a first piezoelectric active layer on a first surface of a substrate. The first piezoelectric active layer has a substantially uniform thickness across the first surface of the substrate. The mirror also includes a first electrode layer on the first piezoelectric active layer. The first electrode layer has a plurality of electrodes arranged in a first pattern and has a substantially uniform thickness across the first piezoelectric active layer. The mirror may further include a second piezoelectric layer on the first electrode layer, and a second electrode layer on the second piezoelectric layer. The electrodes of the first and second electrode layers are configured to supply a voltage to the piezoelectric active layers upon actuation to thereby locally deform the shape of the mirror to correct for optical aberrations.