Inventors:
Keith Fox - Portland OR, US
Carole Mars - Portland OR, US
Willis Kirkpatrick - Yamhill OR, US
Easwar Srinivasan - Beaverton OR, US
Assignee:
Novellus Systems, Inc. - San Jose CA
International Classification:
C23C 16/40
US Classification:
42725537, 4272491, 427579, 427 968, 438787, 438788, 438789, 438790
Abstract:
Methods of preparing a carbon doped oxide (CDO) layer with a low dielectric constant (