US Patent:
20170110602, Apr 20, 2017
Inventors:
- Albuquerque NM, US
Brittany R. Hoard - Albuquerque NM, US
Sang M. Han - Albuquerque NM, US
Swapnadip Ghosh - Albuquerque NM, US
International Classification:
H01L 31/0236
G02B 1/00
H01L 31/20
H01L 31/0747
H01L 31/18
Abstract:
Provided is a method for fabricating a nanopatterned surface. The method includes forming a mask on a substrate, patterning the substrate to include a plurality of symmetry-breaking surface corrugations, and removing the mask. The mask includes a pattern defined by mask material portions that cover first surface portions of the substrate and a plurality of mask space portions that expose second surface portions of the substrate, wherein the plurality of mask space portions are arranged in a lattice arrangement having a row and column, and the row is not oriented parallel to a [110] direction of the substrate. The patterning the substrate includes anisotropically removing portions of the substrate exposed by the plurality of spaces.