Inventors:
James Mrozack - Highland Park IL
Bernard Greenstein - Glenview IL
Assignee:
Motorola, Inc. - Schaumburg IL
International Classification:
G01L 708
G01L 912
Abstract:
A pressure sensor assembly includes a pressure transducer having a pressure displaceable diaphragm bonded to a base. Displacement of the diaphragm results in varying of electrical characterisitcs of the transducer in response to sensed pressure. Electrical output connections (wires) of the transducer extend from a central portion of a top surface of the base, which faces the diaphragm, to a central portion of a base bottom surface and peripheral portions of the diaphragm and base top surface are hermetically bonded together. The transducer is mounted on a carrier plate and integral extensions of the electrical output connections pass through holes in the carrier plate. A housing for the sensor assembly has an opening therein to provide access to the diaphragm by ambient atmosphere/fluid surrouding the housing. A first inner seal bonds at least the peripheral portions of the base bottom surface to the carrier plate, and a second outer seal is positioned between the carrier plate top surface and walls of the housing. The housing walls, carrier plate and first and second seals form an effective seal against ambient atmosphere/fluid which contacts the diaphragm and, therefore, seal and protect the electrical output connections of the transducer.