Inventors:
Suketu Parikh - San Jose CA, US
David Dutton - San Jose CA, US
Pawan Kapur - Palo Alto CA, US
Somnath Nag - Saratoga CA, US
Mehrdad Moslehi - Los Altos CA, US
Joe Kramer - San Jose CA, US
Nevran Ozguven - Mountain View CA, US
Asli Buccu Ucok - Milpitas CA, US
Assignee:
Solexel, Inc. - Milpitas CA
International Classification:
H01L 21/00
US Classification:
438 97, 438 57, 438 59, 438 71, 438478, 438479, 257E21529, 257E31001, 257E3104, 257E3113, 257E2109, 136251, 136252, 136255, 136256, 136261, 29760
Abstract:
A structure and method operable to create a reusable template for detachable thin semiconductor substrates is provided. The template has a shape such that the 3-D shape is substantially retained after each substrate release. Prior art reusable templates may have a tendency to change shape after each subsequent reuse; the present disclosure aims to address this and other deficiencies from the prior art, therefore increasing the reuse life of the template.