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Arnold Augustoni Phones & Addresses

  • 14328 Nambe Ave, Albuquerque, NM 87123 (505) 294-6267
  • 9204 Las Camas Rd NE, Albuquerque, NM 87111
  • 14328 Nambe Ave NE, Albuquerque, NM 87123 (505) 977-0105

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Us Patents

Apparatus And Method To Enhance X-Ray Production In Laser Produced Plasmas

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US Patent:
51757575, Dec 29, 1992
Filed:
Aug 22, 1990
Appl. No.:
7/571253
Inventors:
Arnold L. Augustoni - Albuquerque NM
James B. Gerardo - Albuquerque NM
Thomas D. Raymond - Albuquerque NM
Assignee:
Sandia Corporation-Org. 250 - Albuquerque NM
International Classification:
H01J 3508
US Classification:
378120
Abstract:
Method and apparatus for generating x-rays for use in, for instance, x-ray photolithography. The method of generating x-rays includes the steps of providing a target and irradiating the target with a laser system which produces a train of sub-pulses to generate an x-ray producing plasma. The sub-pulses are of both high intensity and short duration. The apparatus for generating x-rays from a plasma includes a vacuum chamber, a target supported within the chamber and a laser system, including a short storage time laser.
Arnold L Augustoni from Albuquerque, NM, age ~77 Get Report