Inventors:
Arnold L. Augustoni - Albuquerque NM
James B. Gerardo - Albuquerque NM
Thomas D. Raymond - Albuquerque NM
Assignee:
Sandia Corporation-Org. 250 - Albuquerque NM
International Classification:
H01J 3508
Abstract:
Method and apparatus for generating x-rays for use in, for instance, x-ray photolithography. The method of generating x-rays includes the steps of providing a target and irradiating the target with a laser system which produces a train of sub-pulses to generate an x-ray producing plasma. The sub-pulses are of both high intensity and short duration. The apparatus for generating x-rays from a plasma includes a vacuum chamber, a target supported within the chamber and a laser system, including a short storage time laser.