Inventors:
Amaury Gendron - Scottsdale AZ, US
Chai Ean Gill - Chandler AZ, US
Vadim A. Kushner - Tempe AZ, US
Rouying Zhan - Gilbert AZ, US
Assignee:
Freescale Semiconductor, Inc. - Austin TX
International Classification:
H01L 23/58
US Classification:
257487, 257111, 257577, 257E21042, 257E21051, 257E21058, 257E21126, 257E21127, 257E21135, 257E21608, 438289, 438328
Abstract:
An area-efficient, high voltage, single polarity ESD protection device () is provided which includes an p-type substrate (); a first p-well (-) formed in the substrate and sized to contain n+ and p+ contact regions () that are connected to a cathode terminal; a second, separate p-well (-) formed in the substrate and sized to contain only a p+ contact region () that is connected to an anode terminal; and an electrically floating n-type isolation structure (-) formed in the substrate to surround and separate the first and second semiconductor regions. When a positive voltage exceeding a triggering voltage level is applied to the cathode and anode terminals, the ESD protection device triggers an inherent thyristor into a snap-back mode to provide a low impedance path through the structure for discharging the ESD current.