Inventors:
Anthony Vasko - Toledo OH, US
Kristopher Wieland - Toledo OH, US
James Walker - Chagrin Falls OH, US
Alvin Compaan - Holland OH, US
Assignee:
The University of Toledo - Toledo OH
International Classification:
H01L 31/102
US Classification:
257184, 136243, 136244, 136252, 136258, 136262, 136265, 257E25007, 257E27124, 257E27125, 257E31126, 257E33064, 438 22, 438 85, 438 86, 438 94, 438 95, 438 98, 438101
Abstract:
A photovoltaic cell is fabricated onto a polyimide film using an unbalanced RF magnetron sputtering process. The sputtering process includes the addition of 0. 05% to 0. 5% oxygen to an inert gas stream. Portions of the photovoltaic cell are exposed to an elevated temperature CdCltreatment which is at or below the glass transition temperature of the polyimide film.