US Patent:
20220270877, Aug 25, 2022
Inventors:
- Fremont CA, US
Samantha S.H. Tan - Newark CA, US
Yu Jiang - Sunnyvale CA, US
Hui-Jung Wu - Pleasanton CA, US
Richard Wise - Los Gatos CA, US
Yang Pan - Los Altos CA, US
Nader Shamma - Cupertino CA, US
Boris Volosskiy - San Jose CA, US
International Classification:
H01L 21/033
H01L 21/311
H01L 21/027
H01L 21/67
H01L 21/02
H01L 21/467
H01L 21/3065
H01L 21/3213
H01L 21/465
Abstract:
A method of processing a substrate includes: providing a substrate having one or more mandrels comprising a mandrel material, wherein a layer of a spacer material coats horizontal surfaces and sidewalls of the one or more mandrels; and etching and completely removing the layer of the spacer material from the horizontal surfaces of the one or more mandrels and thereby exposing the mandrel material, without completely removing the spacer material residing at the sidewalls of the one or more mandrels. The etching includes exposing the substrate to a plasma formed using a mixture comprising a first gas and a polymer-forming gas, and wherein the etching comprises forming a polymer on the substrate. Polymer-forming gas may include carbon (C) and hydrogen (H).