Ying Yin Wu

7881362, Feb 1, 2011

Sep 15, 2007

11/901346

Avadhani Shridhar - Santa Clara CA, US
Sam Heidari - Menlo Park CA, US
Rouben Toumani - San Jose CA, US
Ying Wu - Cupertino CA, US

Ikanos Communications, Inc. - Fremont CA

H04B 1/38

375219, 375260

A multi-tone transceiver including: a channel controller and a plurality of components forming a transmit path and a receive path. The channel controller configured to determine bit-loading for each successive symbol or tone set based on a 1noise margin target for a first subset of tones in each tone set dedicated to transport of a robust communications channel (RCC) and based on a 2noise margin target less than the 1noise margin target for remaining tones in each tone set dedicated to a standard communications channel (SCC). The plurality of components forming the transmit and receive paths are responsive to the channel controller to select for data modulated on a given tone at least one of smaller constellations and higher gain scaling levels when the given tone corresponds to an RCC tone as compared to an SCC tone, whereby the first set of tones dedicated to the RCC exhibit greater immunity to noise variations than the remaining tones dedicated to the SCC.

20120322270, Dec 20, 2012

Jun 15, 2011

13/161372

Maolin Long - Cupertino CA, US
Alex Paterson - San Jose CA, US
Richard Marsh - San Ramon CA, US
Ying Wu - Dublin CA, US

H01L 21/3065
C23F 1/08

438710, 15634535, 257E21218

A plasma processing chamber and methods for operating the chamber are provided. An exemplary chamber includes an electrostatic chuck for receiving a substrate and a dielectric window connected to a top portion of the chamber. An inner side of dielectric window faces a plasma processing region that is above the electrostatic chuck and an outer side of the dielectric window is exterior to the plasma processing region. Inner and outer coils are disposed above the outer side of the dielectric window, and the inner and outer coils are connected to a first RF power source. A powered grid is disposed between the outer side of dielectric window and the inner and outer coils. The powered grid is connected to a second RF power source that is independent from the first RF power source.

20130186568, Jul 25, 2013

Oct 23, 2012

13/658652

Maolin Long - Cupertino CA, US
Alex Paterson - San Jose CA, US
Ricky Marsh - San Ramon CA, US
Ying Wu - Dublin CA, US
John Drewery - Santa Clara CA, US

H01L 21/67
H05K 9/00

15634549, 15634551, 15634548, 174377

A Faraday shield and a plasma processing chamber incorporating the Faraday shield is are provided. The plasma chamber includes an electrostatic chuck for receiving a substrate, a dielectric window connected to a top portion of the chamber, the dielectric window disposed over the electrostatic chuck, and a Faraday shield. The Faraday shield is disposed inside of the chamber and defined between the electrostatic chuck and the dielectric window. The Faraday shield includes an inner zone having an inner radius range that includes a first and second plurality of slots and an outer zone having an outer radius range that includes a third plurality of slots. The inner zone is adjacent to the outer zone. The Faraday shield also includes a band ring separating the inner zone and the outer zone, such that the first and second plurality of slots do not connect with the third plurality of slots.

20220334867, Oct 20, 2022

Jul 5, 2022

17/857667

- Palo Alto CA, US
Li Ding - Cupertino CA, US
Linglin Yu - Sunnyvale CA, US
Stephen Chu - San Francisco CA, US
Ying Wu - Palo Alto CA, US

G06F 9/455

A data management system comprises: a storage appliance configured to store a snapshot of a virtual machine; and one or more processors in communication with the storage appliance. The one or more processors are configured to perform operations including: identifying a plurality of shards of the virtual machine; requesting a snapshot of each of the plurality of shards; receiving the shards asynchronously; ordering the received snapshot shards sequentially into a results queue; and storing a single snapshot of the virtual machine based on the ordered snapshot shards. Operations may further include maintaining a flow control queue that limits the number of snapshot shards requested.

20220319856, Oct 6, 2022

Jun 23, 2022

17/847971

- Fremont CA, US
Alexander Miller Paterson - San Jose CA, US
Ying Wu - Livermore CA, US

H01L 21/3065
H01J 37/305
H01J 37/32

Systems and methods for etching different features in a substantially equal manner are described. One of the methods includes applying a low frequency bias signal during a low TCP state and applying a high frequency bias signal during a high TCP state. The application of the low frequency bias signal during the low TCP state facilitates generation of hot neutrals, which are used to increase an etch rate of etching dense features compared to an etch rate for etching isolation features. The application of the high frequency bias signal during the high TCP state facilitates generation of ions to increase an etch rate of etching the isolation features compared to an etch rate of etching the dense features. After applying the low frequency bias signal during the low TCP state and the high frequency bias signal during the high TCP state, the isolation and dense features are etched similarly.

20220254608, Aug 11, 2022

Apr 26, 2022

17/729451

- Fremont CA, US
Yuhou Wang - Fremont CA, US
Ying Wu - Livermore CA, US
Alex Paterson - San Jose CA, US

H01J 37/32
H03K 4/92

A system and method for generating a radio frequency (RF) waveform are described. The method includes defining a train of on-off pulses separated by an off state having no on-off pulses. The method further includes applying a multi-level pulse waveform that adjusts a magnitude of each of the on-off pulses to generate an RF waveform. The method includes sending the RF waveform to an electrode.

20220189738, Jun 16, 2022

May 9, 2020

17/607301

- Fremont CA, US
Ying Wu - Livermore CA, US
Alexander Paterson - San Jose CA, US

H01J 37/32

A two-dimensional frequency search grid is defined by a first coordinate axis representing an operating frequency setpoint of an RF signal generator in a first operational state and a second coordinate axis representing an operating frequency setpoint of the RF signal generator in a second operational state. The RF signal generator has a first output power level in the first operational state and a second output power level in the second operational state. The RF signal generator operates in an multi-level RF power pulsing mode by cyclically alternating between the first operational state and the second operational state. An automated search process is performed within the two-dimensional frequency search grid to simultaneously determine an optimum value for the operating frequency setpoint of the RF signal generator in the first operational state and an optimum value for the operating frequency setpoint of the RF signal generator in the second operational state.

20230005718, Jan 5, 2023

Sep 9, 2022

17/942040

- Fremont CA, US
Alex Paterson - San Jose CA, US
Ying Wu - Livermore CA, US

H01J 37/32

Systems and methods for multi-level pulsing of a parameter and multi-level pulsing of a frequency of a radio frequency (RF) signal are described. The parameter is pulsed from a low level to a high level while the frequency is pulsed from a low level to a high level. The parameter and the frequency are simultaneously pulsed to increase a rate of processing a wafer, to increase mask selectivity, and to reduce angular spread of ions within a plasma chamber.