Inventors:
Kanak B. Agarwal - Austin TX, US
Jerry D. Hayes - Georgetown TX, US
Ying Liu - Austin TX, US
Assignee:
International Business Machines Corporation - Armonk NY
International Classification:
G01R 31/26
G01R 33/00
G01R 31/02
Abstract:
A unified test structure having a large number of electronic devices under test is used to characterize both capacitance-voltage parameters (C-V) and current-voltage parameters (I-V) of the devices. The devices are arranged in an array of columnns and rows, and selected by control logic which gates input/output pins that act variously as current sources, sinks, clamps, measurement ports and sense lines. The capacitance-voltage parameter is measured by taking baseline and excited current measurements for different excitation voltage frequencies, calculating current differences between the baseline and excited current measurements, and generating a linear relationship between the current differences and the different frequencies. The capacitance is then derived by dividing a slope of a line representing the linear relationship by the excitation voltage. Different electronic devices may be so tested, including transistors and interconnect structures.