Inventors:
Andres Fernandez - Dublin CA
Timothy Thomas - Portland OR
Xiaolan Chen - Beaverton OR
Steven T. Coyle - Newark CA
Ming Yu - Fremont CA
Marian Mankos - San Francisco CA
Assignee:
Applied Materials, Inc. - Santa Clara CA
International Classification:
H01J 4006
US Classification:
313373, 313542, 313523, 445 47, 445 24
Abstract:
A photocathode as a source of electron beams, having a substrate of optically transmissive diamond and a photoemitter. A photocathode with a single emitting region provides a single electron beam; a photocathode with multiple emitting regions provides multiple electron beams. The photoemitter is positioned on the side of the diamond substrate opposite the surface on which the illumination is incident, and has an irradiation region at the contact with the optically transmissive diamond, and an emission region opposite the irradiation region, these regions being defined by the path of the illumination. The diamond substrate at the irradiation region/emission region interface conducts heat away from this focused region of illumination on the photocathode. Alternately, a diamond film is used for heat conduction, while another material is used as a substrate to provide structural support. The thermal conductivity of diamond is at least three orders of magnitude greater than that of fused silica, which is an alternative substrate material for photocathodes.