Inventors:
Chanh Nguyen - Calabasas CA, US
Jeong-Sun Moon - Chatsworth CA, US
Wah Wong - Montebello CA, US
Miro Micovic - Newbury Park CA, US
Paul Hashimoto - Los Angeles CA, US
International Classification:
H01L031/0328
Abstract:
The present invention utilizes the strong piezoelectric effect, found in group-III nitride materials to circumvent the need to selectively remove Gallium Nitride (GaN) in the fabrication of GaN/AlGaN Heterostructure Field Effect Transistors. The transistor is comprised of a semi-insulating substrate a buffer layer which is in continual contact with the semi-insulating substrate A GaN active channel is atop the buffer layer An AlGaN barrier in laid on top of, and is in continual contact with, the GaN active channel Thereafter, there is a source contact and a drain contact both in physical contact with the GaN active channel There is a gate upon the AlGaN barrier and between the source contact and a drain contact At least one dielectric stressor is placed upon the AlGaN barrier The dielectric stressors are between the gate and the source and drain contacts.