Inventors:
Toan K. Ly - Pasadena CA, US
Jason P. Goodelle - McKees Rocks PA, US
International Classification:
H01L 23/00
US Classification:
257416, 257678, 257692, 257E23002, 438 51
Abstract:
An apparatus and method for manufacturing a micro-electrical mechanical system (MEMS) package comprising a first molded body having a first acoustic port, a second molded body connected to the first molded body, a leadframe at least partially integral with at least one of the first and second molded bodies, a die cavity provided on at least one of the first and second molded bodies and having a second acoustic port, a MEMS die provided on the die cavity, a channel connecting the first and second acoustic ports, the first molded body sealing at least a portion of the channel, and a lid attached to the second molded body and sealing at least a portion of the die cavity.