Sam Chi Lee

7413992, Aug 19, 2008

May 23, 2006

11/440163

Sok Kiow Tan - Newark CA, US
Shenjian Liu - Fremont CA, US
Harmeet Singh - Fremont CA, US
Sam Do Lee - Fremont CA, US
Linda Fung-Ming Lee - Redwood City CA, US

Lam Research Corporation - Fremont CA

H01L 21/302

438706, 438659, 438714, 438719, 438738, 216 60, 216 79, 156345

The embodiments provides an improved tungsten silicide etching process with reduced etch rate micro-loading effect. In one embodiment, a method for etching a layer formed on a substrate is provided. The method includes providing a substrate into a plasma processing chamber, the substrate having a metal silicide layer formed thereon and a patterned mask defined over the metal silicide layer. The method also includes supplying an etching gas mixture of a fluorine-containing gas, a chlorine-containing gas, a nitrogen-containing gas, and an oxygen-containing gas to the plasma processing chamber, wherein the ratio of the nitrogen-containing gas to the fluorine-containing gas is between about 5 to about 15. In addition, the method includes generating a plasma in the plasma processing chamber using the supplied etching gas mixture to etch the metal silicide layer in regions not covered by the patterned mask, the patterned mask defining dense regions and isolated regions, wherein the generated plasma is configured to remove the metal silicide layer in the dense regions and the isolated regions at a reduced etch rate micro-loading.

7899783, Mar 1, 2011

May 30, 2006

11/421049

Yi-Le Gloria Xu - Cupertino CA, US
Sam Chi Lee - San Jose CA, US
Shmuel Shaffer - Palo Alto CA, US

Cisco Technology, Inc - San Jose CA

G06F 7/00
G06F 17/00
G06F 15/167

707613, 709213

A method and system are described for reporting on data integrity in a data repository which is configured for synchronization with at least one other data repository. The method comprises interrogating metadata associated with the data repository to establish a latest two consecutive synchronization times at which no updates were processed. The method further comprises automatically generating an indication message to provide an indication of the data integrity at the latest of the synchronization times.

20110022388, Jan 27, 2011

Jul 27, 2009

12/509797

Sung Fong Solomon WU - Sunnyvale CA, US
Aaron TONG - San Jose CA, US
Sam C. LEE - San Jose CA, US

G10L 15/00

704246, 704E15001

In an example embodiment, there is disclosed an apparatus comprising an audio interface configured to receive an audio signal, a data interface is configured to communicate with at least one social graph, and logic is coupled to the audio interface and the data interface. The logic is configured to identify a calling party. The logic is further configured to acquire data representative of a called party from the audio signal. The logic is configured to initiate a search of the at least one social graph for the data representative of the called party to identify the called party responsive to acquiring the data representative of the called party.

20120084172, Apr 5, 2012

Oct 1, 2010

12/896776

Sam H. Lee - Menlo Park CA, US
Erik C. Smith - Menlo Park CA, US

Alta Energy, Inc. - Menlo Park CA

G06Q 30/00

705 263, 705 261

Disclosed herein are methods and systems for operating an exchange service for renewable energy resources. In one embodiment, an exchange service, implemented on an exchange entity server, receives inputs from property entities related to assets available for installation of a renewable energy setup. The exchange server places this asset in a marketplace, allowing other provider entities to place a bid for installing the renewable energy setup at a location associated with the asset. Examples of the provider entities include a developer entity, a manufacturer entity, a financier entity, etc. In embodiments, the marketplace enables interaction among the provider entities to enable the provider entities to develop and place a composite bid for a selected asset available through the marketplace.

43305660, May 18, 1982

Dec 8, 1980

6/214077

Richard Meyer - Phoenix AZ
Sam H. Lee - San Jose CA

Amour-Dial, Inc. - Phoenix AZ

A23D 500

426606

An edible food coating in the form of a batter which is applied to an item of food such as chicken and the like. The batter coating includes a fluid shortening which contains a solid triglyceride largely in the beta crystal form, a food grade binder and breading materials. The coated food product, when baked, has the attributes of a batter-coated, deep fat fried, or pan fried food product.

60965029, Aug 1, 2000

Mar 30, 1998

9/050559

Sam S.-K. Lee - Campbell CA

C12Q 168
C12Q 170
C07H 1900
C07H 2102

435 6

A UL9 substrate for detecting helicase activity in a UL9 protein is provided. In one embodiment, the substrate includes a first strand including a herpes replication origin sequence and a first single stranded tail; and a second strand including a sequence complementary to the herpes replication origin sequence. In one variation, the first single stranded tail is 3' relative to the herpes replication origin sequence. The second strand may optionally further include a single stranded tail. The single stranded tail on the second strand may be 3' or 5' relative to the sequence complementary to the herpes replication origin sequence. In another variation, the first single stranded tail is 5' relative to the herpes replication origin sequence. The second strand may optionally further include a single stranded tail. The single stranded tail on the second strand may be 3' or 5' relative to the sequence complementary to the herpes replication origin sequence.

46926348, Sep 8, 1987

Apr 28, 1986

6/856920

Sheng Fang - Milpitas CA
Sam H. Lee - Campbell CA

Advanced Micro Devices, Inc. - Sunnyvale CA

H03K 3356
G11C 1140

3072721

A CMOS data register includes a master stage and a slave stage. The master stage is formed of first transfer gates and first storage devices. The slave stage is formed of second transfer gates, second storage devices and third transfer gates. The transfer gates and storage devices are formed of MOS transistors of one conductivity which decreases layout complexity and reduces the amount of chip area required. The data register is formed of a fewer number of transistor components, thereby reducing the loading on the clock signals.

20210407811, Dec 30, 2021

Nov 29, 2018

16/766256

- Fremont CA, US
Zhongkui TAN - Fremont CA, US
Qian FU - Pleasanton CA, US
Sam Do LEE - Newark CA, US

H01L 21/3065
H01L 21/311

A method for forming a stair-step structure in a stack on a substrate is provided. The method comprises at least one stair step cycle. Each stair step cycle comprises trimming the mask and etching the stack. Etching the stack is provided in a plurality of cycles wherein each cycle comprises etching a SiOlayer and etching a SiN layer. Etching a SiOlayer comprises flowing a SiOetching gas into the plasma processing chamber, wherein the SiOetching gas comprises a hydrofluorocarbon, an inert bombardment gas, and at least one of SFand NF, generating a plasma from the SiOetching gas, providing a bias, and stopping the SiOlayer etch. The etching a SiN layer comprises flowing a SiN etching gas into the plasma processing chamber, comprising a hydrofluorocarbon and oxygen, generating a plasma from the SiN etching gas, providing a bias, and stopping the SiN layer etch.