Miao Z Liu

7765234, Jul 27, 2010

Oct 12, 2006

11/580716

Hong Qiu - Union City CA, US
Junwei Bao - Palo Alto CA, US
Wei Liu - Santa Clara CA, US
Jeffrey Alexander Chard - Sunnyvale CA, US
Miao Liu - Mountain View CA, US
Gang He - Sunnyvale CA, US
Hemalatha Erva - Fremont CA, US
Vi Vuong - Fremont CA, US

Tokyo Electron Limited - Tokyo

G06Q 50/00

707793, 702189, 356399, 703 6, 382141, 707953

To manage data flow in generating different signal formats for use in optical metrology, a project data object is created. A first option data object is created. The first option data object has a set of signal parameters. Different settings of the set of signal parameters correspond to different signal formats for diffraction signals. A version number is associated with the first option data object. The first option data object is linked with the project data object. At least a second option data object is created. The second option data object has a set of signal parameters. Different settings of the set of signal parameters correspond to different signal formats for diffraction signals. The set of signal parameters of the first option data object and the set of signal parameters of the second option data object are set differently. Another version number is associated with the second option data object. The second option data object is linked with the project data object.

7783669, Aug 24, 2010

Oct 12, 2006

11/580570

Hong Qiu - Union City CA, US
Junwei Bao - Palo Alto CA, US
Wei Liu - Santa Clara CA, US
Jeffrey Alexander Chard - Sunnyvale CA, US
Miao Liu - Mountain View CA, US
Gang He - Sunnyvale CA, US
Hemalatha Erva - Fremont CA, US
Vi Vuong - Fremont CA, US

Tokyo Electron Limited - Tokyo

G06Q 50/00

707793, 702189, 356399, 703 6, 382141, 707953

To manage data flow in generating profile models for use in optical metrology, a project data object is created. A first profile model data object is created. The first profile model data object corresponds to a first profile model defined using profile parameters. A version number is associated with the first profile model data object. The first profile model data object is linked with the project data object. At least a second profile model data object is created. The second profile model data object corresponds to a second profile model defined using profile parameters. The first and second profile models are different. Another version number is associated with the second profile model data object. The second profile model data object is linked with the project data object. The project data object, the first profile model data object, and the second profile model data object are stored.

20170069498, Mar 9, 2017

Sep 1, 2016

15/254148

Ayaskanta Sahu - Berkeley CA, US
Boris Russ - Berkeley CA, US
Jeffrey J. Urban - Emeryville CA, US
Nelson E. Coates - Oakland CA, US
Rachel A. Segalman - Santa Barbara CA, US
Jason D. Forster - Berkeley CA, US
Miao Liu - Richmond CA, US
Fan Yang - El Cerrito CA, US
Kristin A. Persson - Orinda CA, US
Christopher Dames - Berkeley CA, US

The Regents of the University of California - Oakland CA

H01L 21/228
H01L 29/36
H01L 29/06

This disclosure provides systems, methods, and apparatus related to surface doping of nanostructures. In one aspect a plurality of nanostructures is fabricated with a solution-based process using a solvent. The plurality of nanostructures comprises a semiconductor. Each of the plurality of nanostructures has a surface with capping species attached to the surface. The plurality of nanostructures is mixed in the solvent with a dopant compound that includes doping species. During the mixing the capping species on the surfaces of the plurality of nanostructures are replaced by the doping species. Charge carriers are transferred between the doping species and the plurality of nanostructures.