Lan Gui Yu from 270 13Th St, Oakland, CA 94612

Resumes

Lan Yu

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Principle Application Engineer At Oracle

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Position:

Principle Application Engineer at Oracle

Location:

San Francisco Bay Area

Industry:

Computer Software

Work:

Oracle
Principle Application Engineer
Siebel Systems 2001 - 2006
Senior Software Engineer

Lan Yu

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Location:

United States

Lab Manager At Genentech

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Location:

San Francisco Bay Area

Industry:

Biotechnology

Publications

Us Patents

Methods Of Forming Semiconductor Structures

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US Patent:

20230015781, Jan 19, 2023

Filed:

Jul 15, 2021

Appl. No.:

17/376504

Inventors:

- Santa Clara CA, US
Seshadri Ganguli - Sunnyvale CA, US
Lan Yu - Voorheesville NY, US
Siddarth Krishnan - Newark CA, US
Srinivas Gandikota - Santa Clara CA, US
Jacqueline S. Wrench - San Jose CA, US
Yixiong Yang - Fremont CA, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

H01L 29/45
H01L 29/40
H01L 21/285
H01L 21/324

Abstract:

Methods for forming a semiconductor structure and semiconductor structures are described. The method comprises patterning a substrate to form a first opening and a second opening, the substrate comprising an n transistor and a p transistor, the first opening over the n transistor and the second opening over the p transistor; pre-cleaning the substrate; depositing a titanium silicide (TiSi) layer on the n transistor and on the p transistor by plasma-enhanced chemical vapor deposition (PECVD); optionally depositing a first barrier layer on the titanium silicide (TiSi) layer and selectively removing the first barrier layer from the p transistor; selectively forming a molybdenum silicide (MoSi) layer on the titanium silicide (TiSi) layer on the n transistor and the p transistor; forming a second barrier layer on the molybdenum silicide (MoSi) layer; and annealing the semiconductor structure. The method may be performed in a processing chamber without breaking vacuum.